Laser assisting ultraprecise flying cutting monocrystalline germanium two-dimensional optical rotary drum method

Abstract

The invention relates to a laser assisting ultraprecise flying cutting monocrystalline germanium two-dimensional optical rotary drum method, and belongs to the field of ultraprecise machining. An ultraprecise flying cutting unit, a laser assisting machining unit and a temperature closed-loop control unit are included; the ultraprecise flying cutting unit and a machine tool fixing platform are installed in the direction vertical to the flying cutting main shaft axis direction; the installation position of the laser assisting machining unit is located in the edge flying direction of a flying cutting monocrystalline germanium two-dimensional optical rotary drum of a flying cutter disc in the ultraprecise flying cutting unit; and the temperature closed-loop control unit and the laser assisting unit are installed on the same side, and the heating temperature is monitored in real time and is fed back and adjusted to achieve the laser assisting heating monocrystalline germanium material softening effect. The laser assisting ultraprecise flying cutting monocrystalline germanium two-dimensional optical rotary drum method has the beneficial effects that through the process of local preheating of the edge cutting position of the laser assisting ultraprecise flying cutting monocrystalline germanium two-dimensional optical rotary drum, the breaking strength of the edge cutting position of monocrystalline germanium fragile crystalline materials is reduced, it is guaranteed that the ultraprecise flying cutting process is high in quality and efficiency, and the edge breaking phenomenon of cut edge in the ultraprecise flying cutting process is avoided.

Description

technical field [0001] The invention belongs to the field of ultra-precision processing, and in particular relates to a laser-assisted ultra-precision fly-cutting method for a two-dimensional optical drum of single-crystal germanium. Background technique [0002] At present, single-crystal germanium two-dimensional optical drums are widely used in scanning detection instruments such as two-dimensional scanning imaging detectors, and the demand continues to increase. The single-crystal germanium two-dimensional optical drum needs to have high surface shape accuracy and angular accuracy between the working surfaces, and it is usually processed by single-point diamond ultra-precision fly-cutting method on an ultra-precision machine tool. However, due to the hard and brittle characteristics of the single crystal germanium two-dimensional optical drum material, it needs to be processed within the critical cutting thickness of the brittle-plastic transition to achieve good surface...

AI Technical Summary

Problems solved by technology

[0003] The object of the present invention is to propose a method for laser-assisted ultra-precision fly-cutting of single-crystal germanium two-dimensional optical drums to solve the problem of cutting edges and broken edges in the process of ultra-precision fly-cutting single-crystal germanium two-dimensional optical drums to ensure Improve processing quality and processing efficiency, reduce production costs

Images