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A transmission type spectroscopic focusing system for vacuum ultraviolet laser

A vacuum ultraviolet and focusing system technology, applied in optics, condensers, optical components, etc., can solve the problems of low damage threshold of reflective coatings, reduced reflectivity working time, difficult cleaning of reflective coatings, etc., achieving low cost, high damage threshold, The effect of simple system structure

Active Publication Date: 2019-03-29
TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Reflective focusing mirrors have the advantage of no chromatic aberration; however, they are expensive, bulky, and have a low damage threshold for reflective coatings
In addition, the surface photolysis chemical reaction will generate a pollution layer on the optical surface, and the reflectivity will decrease with the working time, resulting in the loss of VUV light intensity; and it is difficult to clean the reflective coating
Especially when used for high-intensity VUV light, the above-mentioned problems of the reflective focusing system will be more prominent
[0007] In summary, there is no transmissive spectroscopic focusing system for high-intensity vacuum ultraviolet laser

Method used

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  • A transmission type spectroscopic focusing system for vacuum ultraviolet laser
  • A transmission type spectroscopic focusing system for vacuum ultraviolet laser
  • A transmission type spectroscopic focusing system for vacuum ultraviolet laser

Examples

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Embodiment 1

[0047] Embodiment 1 is the spectroscopic focusing system of three convex lenses, and the specific composition is as follows:

[0048] In the present embodiment, the spot diameter of the incident light is 4 mm, the central hole diameter D of the diaphragm is 10 μm, the wavelength of the VUV light is 125 nm, and the wavelength of the fundamental frequency light is 255-640 nm; the first convex lens, the second convex lens, and the third convex lens The focal lengths are f 1 =50mm, f 2 =80mm, f 3 =40mm, the distance L between the first convex lens and the second convex lens 1 =140mm, the distance L between the second convex lens and the diaphragm 2 =183mm, the distance L between the third convex lens and the diaphragm 3 =450mm, the working distance can be obtained as 52mm, and the parameters of diffraction-limited spot size as 500nm can be obtained.

[0049] The convex lenses in this embodiment are all made of magnesium fluoride, the transmittance to 125nm VUV light is 13%, a...

Embodiment 2

[0050] Embodiment 2 is the spectroscopic focusing system of four convex lenses, and concrete composition is as follows:

[0051] On the basis of Embodiment 1, the third convex lens is replaced by a convex lens with a focal length of 450mm, and the parameters and positions of the first and second convex lenses and the diaphragm remain unchanged. The function of the third convex lens is to collimate the divergent VUV light into a collimated beam with a diameter of 20mm. Then place the fourth convex lens 4 with a focal length of 52 mm at a position 50 mm behind the third convex lens 3 to obtain the parameters of a working distance of 52 mm and a diffraction-limited spot size of 500 nm. The convex lens in this embodiment is all made of magnesium fluoride, the transmittance to 125nm VUV light is 10%, and the attenuation rate to 255-640nm fundamental frequency light is 99.93%. The first, second, third and fourth convex lenses can be spherical mirrors. Since spherical mirrors will ...

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Abstract

The invention provides a transmission-type light-splitting focusing system for vacuum ultraviolet and belongs to the technical field of beam splitting focusing. The transmission-type light-splitting focusing system consists of three or four convex lenses and a diaphragm. Respective convex lenses and the diaphragm are perpendicular to an optical path and are arranged in the same optical axis. The first convex lens and the second convex lens are arranged on the same side of the diaphragm front and back, and the remaining convex lens / lenses is / are located on the other side of the diaphragm. The system splits and focuses a vacuum ultraviolet (VUV) source produced by four-wave mixing, achieves an over 99.99% of fundamental frequency light splitting ratio. The total transmittance of VUV (125nm to 150nm) can reach over 10%. During focusing, a high-precision aspheric convex lens can be used for offsetting a spherical aberration so that the system reaches a diffraction limit so as to achieve submicron spot focusing.

Description

technical field [0001] The invention belongs to the technical field of beam splitting and focusing, and in particular relates to a transmissive splitting focusing system for vacuum ultraviolet lasers. Background technique [0002] High-intensity vacuum ultraviolet laser (VUV, wavelength range 120-150nm) can be generated by using four-wave mixing technology. The laser light source has the characteristics of high single-photon energy, narrow laser linewidth, high energy density, and small divergence angle. It is widely used in the fields of atomic and molecular excited state energy level structure measurement, molecular reaction dynamics, and mass spectrometry imaging. Due to the short wavelength of vacuum ultraviolet laser, it can provide sub-micron spatial resolution-in theory, VUV light can be focused to a spot with a diameter of 100nm. Therefore, VUV light has far-reaching significance for submicron biological cell imaging and microstructure analysis of nanomaterials. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B19/00
CPCG02B19/0014G02B19/0095
Inventor 莫宇翔刘峰王佳
Owner TSINGHUA UNIV
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