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Miniature gas enricher and preparation method thereof

A concentrator and gas technology, which is applied in the structural design and preparation of micro-gas concentrators, can solve the problems of high cost, mismatch of concentrators, and low enrichment factor of silicon microstructure concentrators, and achieve Low cost, low cost, rapid temperature rise and good desorption effect

Active Publication Date: 2017-08-04
XI AN JIAOTONG UNIV +1
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Problems solved by technology

[0006] The technical problem to be solved by the present invention is to propose a new type of metal material micro- Structural Design and Preparation Method of Gas Concentrator

Method used

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  • Miniature gas enricher and preparation method thereof
  • Miniature gas enricher and preparation method thereof
  • Miniature gas enricher and preparation method thereof

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Embodiment Construction

[0043]The invention will be further described in detail below in conjunction with the accompanying drawings and embodiments, but it is not used as a basis for any limitation on the invention.

[0044] The metal substrate of the micro-packed enricher of the present invention is copper T2 as an example, but it is not limited to T2, and can also be other metal or alloy materials with good performance; the enrichment object is ethylene gas as an example, and the adsorbent material is CarbosieveSII .

[0045] Such as figure 1 , figure 2 , image 3 , Figure 4 As shown, a micro gas concentrator, including encapsulation layer 2, filling layer 7, stainless steel mesh 6, SiO 2 Dielectric layer 9 , Ti adhesive layer 10 , Ru heating resistance wire 12 , Pt sensitive resistance wire 11 , inlet transfer tube 1 and outlet transfer tube 4 . Wherein, the encapsulation layer 2 and the filling layer 7 are made of red copper T2, a metal material with better heat transfer performance than s...

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Abstract

The invention discloses a miniature gas enricher and a preparation method thereof. The miniature gas enricher comprises a filling layer and a packaging layer covered on the filling layer, wherein a symmetrically distributed miniature spitting channel is processed on the upper surface of the filling layer; absorbing grains are filled in the channel; an air inlet and an air outlet which are communicated with the miniature spitting channel are formed on the packaging layer; a counter bore which is used for fixing a filtering layer is formed at the air outlet; an inlet adapter and an outlet adapter are hermetically arranged corresponding to the air inlet and the air outlet; a SiO2 dielectric layer is arranged on the filling layer; a pair of quick heating elements and a pair of sensitive temperature measurers are respectively arranged on the SiO2 dielectric layer. The enriched gas enters from the inlet adapter, is concentrated and enriched under the physical absorption effect of the absorbing grains and then passes through the filtering layer and is discharged from the outlet adapter. The miniature gas enricher disclosed by the invention can realize miniaturization and has the characteristics of high enriching rate, low power consumption, low cost, easiness in processing, stable materials, easiness in integration, and the like. The thick-film technology of the heating element is simple and the cost is low.

Description

technical field [0001] The invention relates to a structural design and a preparation method of a metal micro gas enricher based on the combination of MEMS technology and traditional mechanical processing technology. Background technique [0002] Ultra-low limit gas detection has always been a huge challenge for various analytical instruments, so it is necessary to improve the detection limit of analytical instruments, so the enricher is an essential and important part of the trace analysis system; it treats The detection gas is adsorbed and quickly analyzed to greatly increase the concentration of trace gases, so as to reach the detection limit of the detection instrument. [0003] The traditional concentrator structure is tube type, which wraps multiple circles of metal heating wires on the inner or outer wall of the adsorption tube, and the tube is filled with corresponding adsorption materials, which can be in various forms such as films and particles; the gas to be enri...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N1/40B23P15/00
CPCG01N1/405B23P15/00
Inventor 王海容韩宝庆李长青吴桂珊吴昌龙田汨龙段滨
Owner XI AN JIAOTONG UNIV
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