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A high-sensitivity thin-film thermocouple sensor chip and its manufacturing method

A thermocouple sensor, thin film technology, applied in thermometers, instruments, measuring heat, etc. using directly sensitive electrical/magnetic components, can solve problems such as excessive cold junction temperature, prevent oxidation failure, enhance sensitivity, improve The effect of output sensitivity

Active Publication Date: 2019-01-15
XI AN JIAOTONG UNIV
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  • Abstract
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Problems solved by technology

[0003] The purpose of the present invention is to provide a high-sensitivity thin-film thermocouple sensor chip and its manufacturing method to solve the problem of excessive cold junction temperature of the alloy thin-film thermocouple in the high-temperature environment in the prior art; the present invention establishes a large heat dissipation gradient and strengthens the film Thermocouple sensitivity, a high-sensitivity thin-film thermocouple sensor chip is proposed, so that it can accurately measure temperature in a non-static high-temperature temperature field for a long time while maintaining miniaturization

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  • A high-sensitivity thin-film thermocouple sensor chip and its manufacturing method

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Embodiment Construction

[0029] The present invention is described in further detail below in conjunction with accompanying drawing:

[0030] refer to figure 1 with figure 2 , a high-sensitivity thin-film thermocouple sensor chip of the present invention includes a housing, and a cavity 5 for placing an alloy thin film and an annular hole 6 for placing graphene are arranged inside the housing. The annular hole 6 is located on the outer periphery of the cavity 5 .

[0031] In the cavity 5, a U-shaped alloy film with a thickness of nanoscale is grown by atomic deposition technology to form a thin-film thermocouple, and in the annular hole 6, reinforced graphene is prepared by reduction of graphene oxide.

[0032] The housing includes three sections: a test probe 1, an intermediate round table 2 and a lead end 3; the outside of the test probe 1 is a cylinder with a diameter of 3 mm and a height of 3 mm. The middle circular platform 2 is a circular platform, the diameter of the upper bottom surface is...

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Abstract

The invention discloses a high-sensitivity thin-film thermocouple sensor chip and a manufacturing method thereof. A thin-film thermocouple is made of a layer of alloy film, and graphene is arranged in the annular hole; the shell includes three sections: a test probe, a middle round table and a lead end. By designing a new sensor structure, the present invention can measure the temperature signal for a long time under the dynamic high-temperature temperature field, and establish a large heat dissipation gradient between the cold end and the hot end of the thermocouple film through the effect of forced heat exchange, thereby enhancing the sensitivity of the film thermocouple. It has the characteristics of high sensitivity, miniaturization, high temperature resistance, oxidation resistance, high Seebeck coefficient, and is suitable for dynamic testing, and at the same time solves the problem in the prior art of solving the cold junction temperature of thin film thermocouples in the dynamic high temperature temperature field testing environment If it is too high, it will cause the problem of low sensitivity.

Description

technical field [0001] The invention belongs to the technical field of miniature temperature sensor chips, and in particular relates to a high-sensitivity film thermocouple sensor chip and a manufacturing method thereof. Background technique [0002] The thermocouple was invented in 1821. Since then, the thermocouple temperature sensor has achieved great success in the fields of steam temperature measurement, thermal response to explosion products, heating, and measuring the surface temperature of high-temperature objects. It has the advantages of simple structure, convenient manufacture, wide measurement range, high precision, small inertia and easy remote transmission of output signals, making it a standardized measurement equipment. Among these sensors, high-temperature temperature sensors play an important role in measuring temperature under harsh operating conditions, and such sensors have achieved success in many different sensor configurations. However, there are som...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01K7/02
CPCG01K7/02
Inventor 田边张仲恺于秋跃林启敬史鹏杜喆景蔚萱蒋庄德
Owner XI AN JIAOTONG UNIV
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