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High-sensitivity film thermocouple sensor chip and making method thereof

A technology of thermocouple sensor and thin film, which is applied in the direction of thermometers, instruments, scientific instruments, etc. that use electric/magnetic elements that are directly sensitive to heat. Effect of Output Sensitivity

Active Publication Date: 2017-06-30
XI AN JIAOTONG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to provide a high-sensitivity thin-film thermocouple sensor chip and its manufacturing method to solve the problem of excessive cold junction temperature of the alloy thin-film thermocouple in the high-temperature environment in the prior art; the present invention establishes a large heat dissipation gradient and strengthens the film Thermocouple sensitivity, a high-sensitivity thin-film thermocouple sensor chip is proposed, so that it can accurately measure temperature in a non-static high-temperature temperature field for a long time while maintaining miniaturization

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  • High-sensitivity film thermocouple sensor chip and making method thereof
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  • High-sensitivity film thermocouple sensor chip and making method thereof

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Embodiment Construction

[0029] The present invention will be described in further detail below in conjunction with the accompanying drawings:

[0030] Reference figure 1 with figure 2 , A high-sensitivity thin-film thermocouple sensor chip of the present invention includes a housing, and a cavity 5 for placing an alloy film and an annular hole 6 for placing graphene are arranged inside the housing. The annular hole 6 is located on the outer periphery of the cavity 5.

[0031] A layer of U-shaped nano-thickness alloy film is grown in the cavity 5 to form a thin-film thermocouple, and the ring hole 6 is reduced by graphene oxide to prepare enhanced graphene.

[0032] The shell includes three sections: the test probe 1, the middle round table 2 and the lead end 3. The outside of the test probe 1 is a cylinder with a diameter of 3mm and a height of 3mm. The middle round table 2 is a round table with an upper bottom surface of 3mm in diameter and a lower bottom surface of 4mm in diameter, forming a certain tap...

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Abstract

The invention discloses a high-sensitivity film thermocouple sensor chip and a making method thereof. The high-sensitivity film thermocouple sensor chip comprises a shell. The shell is internally provided with a cavity for placing an alloy film and an annular hole for placing graphene. The annular hole is at the periphery of the cavity. The cavity is internally provided with an alloy film which is made into a film thermocouple. The annular hole is internally provided with graphene. The shell includes three sections: a test probe, a middle circular truncated cone, and a lead end. By designing a new sensor structure, temperature signals can be measured for a long time in a dynamic high temperature field. Through forced heat transfer, a large thermal gradient is formed between the cold end and the hot end of the thermocouple film, and the sensitivity of the film thermocouple is enhanced. The sensor chip has the characteristics of high sensitivity, small size, resistance to high temperature, anti-oxidation, high Seebeck coefficient, and applicability to dynamic test. The problem in the prior art that the film thermocouple is of low sensitivity due to too high temperature at the cold end in a dynamic high temperature field test environment is solved.

Description

Technical field [0001] The invention belongs to the technical field of miniature temperature sensor chips, and specifically relates to a high-sensitivity thin-film thermocouple sensor chip and a manufacturing method. Background technique [0002] The thermocouple was invented in 1821. After that, the thermocouple temperature sensor has achieved great success in the fields of steam temperature measurement, thermal response to explosive products, heating, and measuring the surface temperature of high-temperature objects. Its advantages such as simple structure, convenient manufacture, wide measuring range, high precision, low inertia and easy remote transmission of output signal make it a standardized measuring equipment. Among these sensors, the high-temperature temperature sensor has an important position in measuring the temperature under severe working conditions. This kind of sensor has made achievements in many different sensor configurations. However, there are some shortco...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K7/02
CPCG01K7/02
Inventor 田边张仲恺于秋跃林启敬史鹏杜喆景蔚萱蒋庄德
Owner XI AN JIAOTONG UNIV
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