Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Measuring device and method for free-form surface based on metallic silver enhanced fluorescence

A technology for enhancing fluorescence and measuring devices, applied in measuring devices, adopting optical devices, instruments, etc., can solve the problems of uneven fluorescent interlayer and large surface height error, so as to reduce measurement cost, small surface height error, The effect of simple light path

Inactive Publication Date: 2019-03-29
HARBIN INST OF TECH
View PDF7 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to solve the problem of large surface height error due to the inhomogeneity of the fluorescent intermediary layer on the surface of the sample, and to provide a free-form surface measurement device and its measurement method based on metallic silver enhanced fluorescence

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Measuring device and method for free-form surface based on metallic silver enhanced fluorescence

Examples

Experimental program
Comparison scheme
Effect test

specific Embodiment approach 1

[0018] Specific implementation mode one: the following combination figure 1 Describe this embodiment, the free-form surface measurement device based on metallic silver enhanced fluorescence described in this embodiment, the measurement device includes an illumination module, a detection module and a sample module;

[0019] According to the propagation direction of the illumination light, the illumination module is as follows: laser 1, collimator 2, aperture 3, polarization beam splitter prism 4, scanning galvanometer 5 and scanning lens 6;

[0020] According to the signal light propagation direction, the detection module is as follows: scanning lens 6, scanning galvanometer 5, polarization beam splitter prism 4, optical filter 9, collecting lens 10, pinhole 11 and photodetector 12;

[0021] The sample module includes a sample to be tested 7 and a three-dimensional micro-displacement stage 8 for placing the sample to be tested 7;

[0022] The surface of the sample to be tested...

specific Embodiment approach 2

[0024] Specific implementation mode two: the following combination figure 1 This embodiment will be described. This embodiment will further describe the first embodiment. The scan lens 6 is used as an illumination and imaging lens, and has a field of view of 50 mm×50 mm.

specific Embodiment approach 3

[0025] Specific implementation mode three: the following combination figure 1 This embodiment will be described. This embodiment will further describe Embodiment 1. The wavelength of the laser beam emitted by the laser 1 is 532nm, and the optical power of the illumination light after passing through the scanning lens 6 is less than 1w.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

Disclosed is a free-form curved surface measurement apparatus based on silver-enhanced fluorescence, comprising an illumination module, a detection module and a sample module; the illumination module, according to the propagation direction of illumination light, successively includes: a laser (1), a collimating lens (2), a diaphragm (3), a polarising light-splitting prism (4), a scanning galvanometer (5) and a scanning lens (6); the detection module, according to the propagation direction of signal light, successively includes: a scanning lens (6), a scanning galvanometer (5), a polarising light-splitting prism (4), an optical filter sheet (9), a collecting lens (10), a pin hole (11) and a photoelectric detector (12); the sample module comprises a sample to be measured (7) and a three-dimensional micro-digit objective table (8) used for placing the sample to be measured (7); and the surface of the sample to be measured (7) is plated with a metal fluorescence thin film. The apparatus can solve the problem of large surface shape height errors due to lack of uniformity in a fluorescent dielectric layer on the sample surface.

Description

technical field [0001] The invention relates to a free-form surface measuring device based on metallic silver enhanced fluorescence and a measuring method thereof, belonging to the technical field of optical precision measurement. Background technique [0002] When using a large-aperture free-form surface sample measurement device, a layer of weakly attached nanometer-thick fluorescent medium is deposited on the sample surface by using physical vapor deposition technology to construct an isotropic fluorescent scattering surface, and then collect the light emitted by the thin film on the sample surface. The axial envelope curve is obtained by fluorescence, and the surface morphology of the sample can be obtained through image processing. [0003] However, when calculating the z-axis height of the scanning point, a confocal axial response peak position shift will be introduced due to the film thickness. In practice, due to the inhomogeneity of the fluorescent intermediary lay...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/30
CPCG01B11/303G01B11/24
Inventor 刘俭刘辰光李亮刘妍谭久彬
Owner HARBIN INST OF TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com