Spiral stacked integrated inductor and transformer
A spiral, stacked technology, applied in inductors, fixed inductors, semiconductor devices, etc., can solve the problem of occupying a large chip area, achieve high symmetry, save component area, and reduce winding complexity.
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[0017] The technical terms in the following explanations refer to the customary terms in this technical field. If some terms are explained or defined in this manual, the explanations or definitions of this part of the terms shall prevail.
[0018] figure 1 It is a structural diagram of an embodiment of the spiral stacked integrated inductor of the present invention. The helical stacked integrated inductor 100 is composed of a helical coil 110 and a helical coil 120. Most of the metal wire segments of the helical coil 110 are located in the first metal layer in the semiconductor structure, and most of the metal wire segments of the helical coil 120 are located in the The second metal layer in the semiconductor structure, that is, the helical coil 110 is substantially located on the plane of the first metal layer, and the helical coil 120 is substantially located on the plane of the second metal layer. The helical coil 110 has an end point 111 - a and an end point 111 - b and i...
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