Preparation method and device of sige-si-sige heteroge-based solid-state plasma pin diode
A plasma and diode technology, used in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve the problems of large implantation dose and energy, low integration, incompatibility, etc., to improve breakdown voltage and improve implantation. Efficiency and current, effect of suppressing influence
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Embodiment 1
[0054] See figure 1 ,figure 1 It is a flow chart of a method for manufacturing a SiGe-Si-SiGe heterogeneous Ge-based solid-state plasma PiN diode according to an embodiment of the present invention. The method is suitable for preparing a GeOI-based lateral solid-state plasma PiN diode, and the GeOI lateral solid-state plasma PiN diode Bulk PiN diodes are mainly used to make solid-state plasmonic antennas. The method comprises the steps of:
[0055] (a) select a GeOI substrate;
[0056] (b) setting an isolation region in the GeOI substrate;
[0057] (c) forming a P-type trench and an N-type trench in the GeOI substrate by photolithography;
[0058] (d) using an ion implantation process to form a P-type active region and an N-type active region in the top layer Ge of the GeOI substrate;
[0059] (e) Lithographic lead holes and passivation treatment to complete the preparation of the heterogeneous Ge-based solid-state plasmonic PiN diode.
[0060] Among them, for step (a), t...
Embodiment 2
[0096] See Figure 2a-Figure 2r , Figure 2a-Figure 2r It is a schematic diagram of a method for preparing a SiGe-Si-SiGe heterogeneous Ge-based solid-state plasma PiN diode according to an embodiment of the present invention. On the basis of the above-mentioned embodiment 1, the length of the prepared channel is 22nm (the length of the solid-state plasma region is 100 nm. Micron) GeOI-based solid-state plasma PiN diode as an example to describe in detail, the specific steps are as follows:
[0097] Step 1, substrate material preparation steps:
[0098] (1a) if Figure 2a As shown, the (100) crystal orientation is selected, the doping type is p-type, and the doping concentration is 10 14 cm -3 A GeOI substrate sheet 101, the thickness of the top layer Ge is 50 μm;
[0099] (1b) if Figure 2b As shown, a first layer of SiO with a thickness of 40nm is deposited on a GeOI substrate by chemical vapor deposition (Chemical vapor deposition, CVD for short). 2 layer 201;
[01...
Embodiment 3
[0127] Please refer to image 3 , image 3 It is a schematic diagram of the device structure of a SiGe-Si-SiGe heterogeneous Ge-based solid-state plasma PiN diode according to an embodiment of the present invention. The heterogeneous Ge-based solid-state plasma PiN diode adopts the above-mentioned figure 1 The preparation method shown is made, specifically, the Ge-based solid-state plasma PiN diode is prepared and formed on the GeOI substrate 301, and the P region 304, the N region 305 of the PiN diode and the laterally located P region 304 and the N region The I regions between 305 are located in the top layer Ge302 of the GeOI substrate. Wherein, the PiN diode can be isolated by STI deep trenches, that is, an isolation trench 303 is provided outside the P region 304 and the N region 305, and the depth of the isolation trench 303 is greater than or equal to the thickness of the top layer Ge302.
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