Heat-conductivity scanning system based on pumping-detection heat reflection technology

Abstract

The invention provides a heat-conductivity scanning system based on a pumping-detection heat reflection technology. The heat-conductivity scanning system is characterized in that laser emitted from a pulse laser passes through a first 1 / 2 wave plate and then is divided into two beams by a first polarized splitting prism; a laser beam I is continuously transmitted by the first polarized splitting prism, and passes through a laser frequency-doubling module, a short-wave-pass light filter, a laser modulator and a short-wave reflection mirror in sequence to reach a cold light mirror, wherein the laser modulator is connected with a signal generator; a laser beam II passes through a long-wave reflection mirror, a right-angled reflection mirror, a second 1 / 2 wave plate, a second polarized splitting prism and a 1 / 4 wave plate in sequence to reach the cold light mirror; the laser beam I and the laser beam II are converged and then reach a sample fixing frame through an objective, wherein the sample fixing frame is fixed on a three-dimensional electric moving platform which is connected with a servo motor controller; and the laser beam II is reflected by a sample, passes through the objective lens, the cold light mirror, the 1 / 4 light filter and the second polarized splitting prism and then is focused to a photoelectric detector by a convex lens.

Description

technical field [0001] The invention belongs to the technical field of thermal conductivity testing, and mainly relates to ultrashort laser pulse pumping detection technology, in particular to a thermal conductivity scanning system based on pumping detection heat reflection technology. Background technique [0002] Micro-nano structure materials have been widely used in microelectronics, optoelectronics and other fields, and these microdevices will generate extremely high heat flux density during operation, and heat accumulation will directly affect the working efficiency and reliability of such devices. It is extremely urgent to solve the heat dissipation problem of the above-mentioned micro-devices, which requires accurate characterization of the heat transport properties of the micro-nano structure materials that make up the above-mentioned micro-devices in order to reveal its heat transport mechanism. In the study of ultrafast thermodynamic processes, it is often necessa...

AI Technical Summary

Problems solved by technology

In the traditional ultrashort laser pulse pumping detection system, only the thermal conductivity of an independent position on the sample surface can be measured, but the thermal conductivity distribution within the specified range of the sample surface cannot be obtained, which makes the traditional measurement system unable to meet the needs of microelectronics, optoelectronics, etc. The field requires a large number of thermal conductivity distributions on the surface of samples with microstructures within a specified range

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