Adaptive planning method of space scanning range of white light interference profile device

Abstract

The invention relates to an adaptive planning method of the space scanning range of a white light interference profile device. The method comprises steps of 1) using a white light interference profile device to carry out vertical large-range scanning and image acquisition and using an energy gradient function and a method of exhaustion to position an optimal interference position in an image; 2) using the ViBe algorithm to carry out white light interference fringe extraction and carry out binary processing on the extraction result, thereby finishing white light interference fringe identification; and 3) using a stepping motor to drive a piezoelectric ceramic phase shifter and an interference objective lens to upwards move and then downwards move, carrying out fringe identification operation in the step 2) on each frame of image acquired by a CCD camera in movement and extracting a scanning section according to the obtained extraction result subjected to binaryzation. According to the invention, sensing ability for interference fringes can be greatly improved; automatic planning of scanning ranges is finished; and scanning efficiency of the white light interference profile device and the scanning data utilization rate are effectively improved.

Description

technical field [0001] The invention belongs to the technical field of microstructure optical non-destructive testing, in particular to an adaptive planning method for the spatial scanning range of a white light interference profiler. Background technique [0002] The development of micro-nano-scale precision machining technology has continuously improved the integration of components and improved their functionality, but also brought new challenges to measurement. As an important optical nondestructive testing method, white light scanning interferometry has the characteristics of non-contact, high precision, and short measurement time, so it has been widely used in the field of precision nondestructive testing. At the same time, the research on white light scanning interferometry has become a Research hotspot in the field of optical nondestructive testing. [0003] The structure of the currently commonly used white light interference profiler is shown in Figure 1(a), which...

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Problems solved by technology

[0004] But nowadays, most white light interferometric profilers need manual scanning presetting before scanning. Due to the time-consuming operation, complicated process and low measurement efficiency, they cannot meet the needs of large-scale chip measurement; in addition, in a few Most of the devices that realize automatic scanning cannot accurately locate the scanning range, which eventually leads to the collection of a large amount of useless data during the scanning process, resulting in varying degrees of impact on the scanning speed and later data processing

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