Evaporation plating crucible and evaporation plating system

Abstract

The invention discloses an evaporation plating crucible and an evaporation plating system and belongs to the technical field of equipment manufacturing. The evaporation plating crucible comprises a crucible body, a crucible cover detachably arranged at an outlet of the crucible body and at least one spray nozzle. The spray nozzles are fixed to the crucible cover to communicate the interior of the crucible body with the exterior of the crucible body. The crucible body is provided with at least one through hole. The evaporation plating crucible further comprises at least one sealing cover and at least one cleaning assembly. The sealing covers are openable and are used for sealing the through holes. The cleaning assemblies can penetrate through the through holes to go into the crucible body and clean the spray nozzles. By adopting the evaporation plating crucible, the cleaning time can be greatly saved, the productivity of the evaporation plating process can be improved, and the cost can be lowered.

Description

technical field [0001] The invention relates to the technical field of equipment manufacturing, in particular to an evaporation crucible and an evaporation system comprising the evaporation crucible. Background technique [0002] Generally, the display mode of the display device includes a liquid crystal display (Liquid Crystal Display, LCD) and an organic light-emitting diode display (Organic Light-Emitting Diode, OLED). Compared with a liquid crystal display (LCD), the organic light-emitting diode display (OLED) has The advantages of thin and light, low power consumption, high contrast, high color gamut and flexible display have become the development trend of the next generation of displays. The organic light emitting diode display (OLED) includes an active matrix organic light emitting diode (Active Matrix Organic Light Emitting Diode, AMOLED) and a passive matrix organic light emitting diode (Passive Matrix Organic Light Emitting Diode, PMOLED). When realizing organic ...

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Problems solved by technology

[0004] However, during the evaporation process of the organic material (OLED), since the evaporated organic material (OLED) has a fluffy structure, it is easy to accumulate in the evaporation hole of the crucible lid until the evaporation hole is completely blocked.

However, due to the particularity of the manufacturing process of the organic light-emitting diode (OLED) display device, it is necessary to continuously complete the evaporation of the organic material (OLED) in a continuous vacuum environment, and once the evaporation hole is blocked, the organic material (OLED) will Unable to evaporate, so that the evaporation process cannot continue, seriously affecting the production schedule

In this case, the traditional solution is to cool the organic material (OLED) to room temperature, then open the chamber of the evaporation equipment, and deal with the evaporation source blocking the evaporation hole, then close the chamber of the evaporation equipment, and then start Reheating the organic material (OLED) to continue the evaporation process, usually this process takes tens of hours, has a serious impact on the production plan and affects product quality

In addition, the material of the organic evaporation crucible is titanium, which is heated by heating wire. The low thermal conductivity of titanium and the high-temperature deformation of the heating wire will cause uneven heating of the material in the crucible, resulting in local high temperature, which will lead to ashing of the organic material (OLED) Denaturation, affecting product performance

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