Three-dimensional non-volatile memory structure and fabrication method thereof
A non-volatile, manufacturing method technology, used in semiconductor devices, electrical solid state devices, electrical components, etc., can solve the problem of increased operational instability of memory components, poor electrical performance of memory components, and increased leakage current of memory components. problems, to achieve the effect of improving the instability of threshold voltage drift, reducing leakage current, and reducing operating voltage
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0062] Figure 1A It is a three-dimensional schematic diagram of a three-dimensional non-volatile memory structure according to an embodiment of the present invention. Figure 1B for Figure 1A A partial stereoscopic schematic diagram of the diagram, in order to facilitate the description of the configuration relationship between the various components. Figure 1C for along Figure 1A Sectional view of the I-I' section line in .
[0063] Please also refer to Figure 1A to Figure 1C , the three-dimensional non-volatile memory structure 100 includes a substrate 101 , a stack structure 102 , charge storage pillars 104 , channel pillars 106 and ferroelectric material pillars 108 . In this embodiment, the three-dimensional nonvolatile memory structure 100 is illustrated by taking a three-dimensional NAND (inverted AND) flash memory as an example, but the present invention is not limited thereto. The substrate 101 is, for example, a semiconductor substrate, such as a silicon subst...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com