Valve head, parallel error automatic compensation device and electron microscope

Abstract

The invention provides a valve head, a parallel error automatic compensation device and an electron microscope. The valve head comprises a movable member and a movable member supporting means. The movable member is provided with a second sealing plane matched with a first sealing plane of a fixed member. One side of the movable member, back on to the fixed member, is provided with a first accommodating groove. The movable member supporting means is provided with a spherical surface adapted to be embedded in the first accommodating groove. The spherical surface is in point contact with the groove bottom holding point of the first accommodating groove. The spherical surface is in line contact with the groove wall of the first accommodating groove. The spherical surface is used for supporting the movable member to float relative to the fixed member in a direction back on to the fixed member. According to the technical scheme of the invention, the valve head is low in machining difficulty and high in adjustment sensitivity, wherein the parallelism error of two planes in each direction can be eliminated. Therefore, the two sealing planes can be adequately fitted with each other. The invention also provides a parallel error automatic compensation device provided with the above valve head, and an electron microscope provided with the compensation device and used for ensuring the sealing repeatability.

Description

technical field [0001] The invention relates to the technical field of automatic error compensation, in particular to a valve head, a parallel error automatic compensation device with the valve head and an electron microscope. Background technique [0002] The scanning electron microscope is an electron optical instrument that uses a focused electron beam to scan the sample surface line by line to obtain a secondary electron image or a backscattered electron image. The path of the electron beam emitted from the electron gun to the sample surface is called the optical path. The middle is called the optical axis. The electron beam is emitted by the electron gun, passes through the lens barrel and finally reaches the sample in the sample chamber. In the actual use process, the replacement frequency of the sample is relatively high, and the field emission electron gun belongs to the electron gun of the long-term working system. The current of the electron gun Once loaded, it is ...

AI Technical Summary

Problems solved by technology

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defects of high processing difficulty and low adjustment sensitivity of the valve head in the prior art, so as to provide a valve head with high sensitivity and easy processing

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