Surface waviness and roughness online measuring instrument

Abstract

The invention discloses a surface waviness and roughness online measuring instrument, and the measuring instrument comprises a measuring head and a drive device. The measuring head is a confocal displacement meter measuring head, and the drive device is a voice coil motor. A confocal displacement meter is driven by a drive platform of the voice coil motor to operate. The measuring instrument comprises a connection board, and the connection board enables the confocal displacement meter and the voice coil motor to be installed above a detection position of production equipment. According to the invention, the measuring instrument achieves non-contact measurement, does not scrape the surface of a sample, and can measure a flexible or wet sample. The moving speed of the voice coil motor is high, and the measuring instrument just needs one second to measure one waviness value, and can achieve the high-efficiency online detection. The whole measuring instrument is small and exquisite, and can be conveniently installed on each production line. In addition, compared with a conventional lead screw or line guide rail, the voice coil motor is more stable, and can reduce the impact on the measurement data from a scanning device.

Description

technical field [0001] The invention relates to a measuring instrument, in particular to an on-line measuring instrument for measuring surface waviness and roughness on the surface of precision components in industries such as electronics and automobiles. Background technique [0002] In the prior art, two kinds of instruments are required to measure the surface waviness and roughness of objects, and the specific instruments used are as follows: [0003] The instruments used for waviness detection are profiler, cylindrical meter / roundness meter. The profiler detects the microscopic unevenness of the surface of the part by setting the filter wavelength, that is, the surface roughness parameter and waviness. Due to the different calculation functions of the developed software, different The number of parameters that can be detected by the equipment of different models and manufacturers is different, and the surface roughness and waviness of the parts along the running directio...

AI Technical Summary

Problems solved by technology

[0004] The above-mentioned measuring instruments have the following disadvantages: 1. The existing waviness detection technologies all use contact-type slow scanning of equipment such as profilers or cylindrical instruments. The equipment is bulky and the scanning efficiency is very low, and efficient non-contact online detection cannot be realized.

2. The probe of the existing waviness detection technology adopts the traditional contact probe, and the driving device adopts the screw guide rail. During the measurement process, the waviness measurement data is unstable due to the vibration of the contact and the screw guide rail.

[0014] Although the method of using samples to evaluate surface roughness based on vision and touch is simple, it will be affected by subjective factors and usually cannot obtain the correct surface roughness value.

For example, the stylus method has the following defects: 1. There is a certain limitation in the measurement range, which is smaller than the range covered by the visual method; 2. The tip of the stylus acts on the surface to be measured, and the contact force is about several millinewtons to tens of millinewtons. , and varies greatly with the height, which will scratch the surface to be measured, especially the soft surface, so the stylus method is not suitable for the measurement of soft material surfaces; 3. Due to the limitation of the tip radius, it is impossible to measure the ultra-precision surface measurement. The high-frequency part of the profile is concerned, so the mechanical stylus method is not suitable for the measurement of ultra-precision surface roughness, and is generally only used for surfaces with surface roughness on the sub-micron level and larger

The scope of application of the light section method is limited and manual point selection is required, resulting in low measurement efficiency

Interferometry also has a certain measurement range limitation, high measurement accuracy, but the smallest range

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