MEMS resonant torque sensor used for linear micro-nano material torsion performance measurement

Abstract

A MEMS resonant torque sensor used for linear micro-nano material torsion performance measurement comprises a monocrystalline silicon substrate, a silicon dioxide insulating layer and a monocrystalline silicon structure layer. The monocrystalline silicon structure layer comprises two ''Z''-shaped micro-amplification beams. Lever beam tops are connected to an input beam. Lever beam bottoms are connected to one end of an output beam. Lower middle parts of the lever beams are connected to a fifth anchor point between the two lever beams through a fulcrum beam. The input beam is fixed to a fourth anchor point through a connection beam. Keys which are connected and are located between the two opposite input beams are installed with a linear micro-nano material to be measured. The other end of the output beam is connected to a double-end fixed resonance tuning fork. The double-end fixed resonance tuning fork is connected to a third anchor point. A plate capacitor group of the double-end fixed resonance tuning fork is fixed to first and second anchor points. The structures, except for the anchor points, are in a suspending state. Through metal electrode plates sputtered on the first, second and third anchor points, the whole sensor is placed in a self-excited oscillation circuit. The size of the sensor is small, sensitivity is high and a measured range is large.

Description

technical field [0001] The invention relates to the technical field of torque sensors, in particular to a MEMS resonant torque sensor for measuring the torsional performance of linear micro-nano materials. Background technique [0002] In recent years, with the development of nanotechnology, micro-nano materials have been widely used in aerospace, military industry, biomedicine, automatic control and other fields. There is a big difference between the microscopic mechanical properties of materials and the macroscopic classical mechanical properties, so the testing of mechanical properties of micro-nano materials is an important research topic, among which there are relatively mature testing methods such as uniaxial tensile method and beam bending experiment. et al. have made in-depth research on the tensile and bending deformation of linear micro-nano materials, but less attention has been paid to the mechanical performance testing of materials under torsional service. [0...

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Problems solved by technology

In summary, there is no MEMS resonant sensor for measuring the torsional performance of micro-nano materials in the current domestic invention patents

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