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Straight-hole type spraying plate capable of preventing hollow cathode discharge

A hollow cathode discharge and spray plate technology, which is applied in the manufacture of circuits, electrical components, semiconductor/solid-state devices, etc., can solve problems such as arc discharge, achieve simple structure, improve process stability, and avoid glow discharge.

Inactive Publication Date: 2017-03-01
PIOTECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the above problems, the present invention designs a straight-hole spray plate to solve the problem of arc discharge caused by hollow cathode discharge in the process of existing equipment

Method used

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  • Straight-hole type spraying plate capable of preventing hollow cathode discharge
  • Straight-hole type spraying plate capable of preventing hollow cathode discharge
  • Straight-hole type spraying plate capable of preventing hollow cathode discharge

Examples

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Embodiment

[0017] refer to Figure 1-Figure 3 , a straight-hole type spray plate for preventing hollow cathode discharge, comprising a spray plate main body 1 with a fixed screw hole 3, and a small hole 2 is formed on the spray plate main body 1.

[0018] The small hole 2 adopts an elongated structure;

[0019] The ratio of diameter to length of the small hole 2 is more than 1:6, and the maximum is 1:15;

[0020] The small holes 2 are distributed in an equilateral triangle array, and the hole area is slightly larger than the area of ​​the wafer.

[0021] In the present invention, since the small hole 2 adopts a slender straight hole structure, the flow resistance of the hole is very large, and there is a large pressure difference between the back and the front of the spray plate, so after the process gas is fully mixed from the top of the spray plate main body 1, It can spray out from the small hole 2 evenly. During the process, when the free electrons pass through the small hole 2, t...

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Abstract

The invention relates to a straight-hole type spraying plate capable of preventing hollow cathode discharge, which mainly solves a problem of arc discharge caused by hollow cathode discharge of existing equipment in the technical process. The spraying plate comprises a spraying plate main body provided with fixing screw holes, and the spraying plate main body is provided with small holes. The small holes adopt a long and thin structure, the diameter-to-length ratio of the small holes reaches 1:6, and the maximum diameter-to-length ratio reaches 1:15. The small holes are distributed by adopting a regular triangle array mode, and the tapping area is slightly greater than the wafer area. The straight-hole type spraying plate can effectively prevent electrons from passing through the small holes, thereby avoiding glow discharge at the reverse side of the spraying plate, and improving the process stability. The straight-hole type spraying plate has the characteristics of simple structure, safety and reliability, and can be widely applied to the technical field of semiconductor film deposition.

Description

technical field [0001] The invention relates to a novel spray plate for preventing hollow cathode discharge for semiconductor coating equipment. The spray plate is mainly used in the high-temperature process in the reaction chamber of the semiconductor coating equipment, and belongs to the application technical field of semiconductor thin film deposition. Background technique [0002] The small hole of the shower plate of the existing semiconductor coating equipment adopts a stepped structure, and the hole on the back is larger. During the high-temperature process, electrons will easily pass through the small hole to the back of the spray plate. It is within the warping range of the hollow cathode discharge, so a glow area will be formed on the back of the spray plate, which will affect the process quality and further affect the product yield. Contents of the invention [0003] In order to solve the above problems, the present invention designs a straight-hole spray plate ...

Claims

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Application Information

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IPC IPC(8): H01L21/67
CPCH01L21/67011
Inventor 柴智
Owner PIOTECH CO LTD
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