Device and method for detecting contours of large-caliber aspheric surface components

Abstract

The invention belongs to the technical field of optical precision tests, and relates to a device and a method for precisely detecting large-caliber aspheric surfaces. The device and the method can be used for detecting the contours of large aspheric surface components in precision optical systems in a high-precision manner. The device is of an open type contour instrument structure with rotary-linear datum common base planes on the basis of linear / rotary datum technologies and the like, so that the contours of the large-caliber aspheric surface components can be detected on the basis of precision flotation rotary centers in the high-precision manner. The device and the method have the advantages that common base plane designs for rotary-linear datum systems, turning designs for measurement frames and designs for open type non-gantry structures are adopted, Abbe errors of instruments can be reduced, the movement precision of a precision linear flotation guide rail can be realized to the greatest extent, and parameters of the contour of a mother line of each to-be-detected aspheric surface can be directly measured by a sensing measuring system which synchronously moves with the precision linear flotation guide rail; the contours of multiple mother lines of the to-be-detected aspheric surfaces can be measured by the aid of precision flotation rotary technologies, and the contours of the large-caliber aspheric surfaces can be quickly detected in the high-precision manner by means of fitting.

Description

technical field [0001] The invention belongs to the technical field of optical precision testing, and relates to a large-diameter precision aspheric surface detection device and method, which can be used for high-precision detection of the surface profile of a large-scale high-precision aspheric surface element in a precision optical system. [0002] technical background [0003] Large-scale high-precision aspheric optical components play an extremely important role in precision optical systems such as aerospace cameras and astronomical telescopes. In aspheric surface processing, in order to meet the design requirements of aspheric surface shape and roughness, it generally adopts manufacturing processes such as processing-inspection-reprocessing-reinspection. To a certain extent, the key to obtaining high-precision aspheric components It lies in whether reliable and effective detection technology can be provided to guide the processing, especially in the milling and polishing...

AI Technical Summary

Problems solved by technology

This method is suitable for surface shape detection of aspheric components with any caliber. Its disadvantage is that it adopts single-point scanning and has low efficiency. Due to the measurement principle on which the probe is based, its response speed is limited, the measurement time is long, and changes in environmental conditions will introduce Measurement error, surface shape measurement accuracy is limited

[0008] At present, the measurement accuracy of the existing aspheric surface profile measuring instrument is mainly limited by the rotation accuracy of the spindle, the accuracy of the linear guide rail, the position error between the references and the sensing technology, etc., and the compensability of the motion error of the spatial reference is not fully utilized.

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