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Vacuum slit valve

A valve and vacuum technology, which is applied in the direction of lifting valves, valve devices, engine components, etc., can solve the problems of poor vacuum sealing effect, damaged strips, etc., and achieve the effect of ensuring vacuum state, ensuring sealing, and increasing contact area

Active Publication Date: 2017-02-22
威海斡兹真空科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Aiming at the above-mentioned problems of damaged strips and poor vacuum sealing effect in the prior art, the present invention provides a vacuum slit valve, which solves the problem of vacuum sealing between different vacuum chambers without damaging the strips.

Method used

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Embodiment Construction

[0038] In the following, the present invention will be specifically described through exemplary embodiments. It should be understood, however, that elements, structures and characteristics of one embodiment may be beneficially incorporated in other embodiments without further recitation.

[0039] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "inner", "outer", "left", "right", "upper", "lower" etc. are based on the The positional relationship is only for the convenience of describing the present invention and simplifying the description, but does not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first", "second", "third", "fourth", and "fifth" are used for descriptive purposes only and should not be const...

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Abstract

The invention relates to a vacuum slit valve which comprises a valve body. The valve body is provided with a channel for conveying a strip, and a vacuum accommodating cavity is disposed in the valve body. A valve body assembly and a valve plate assembly are placed in the vacuum accommodating cavity, and an executor connected with the valve plate assembly is arranged outside the valve body assembly. The valve body assembly is provided with a channel for conveying the strip, and the channel arranged on the valve body assembly is communicated with the channel arranged on the valve body, an included angle between the sealing surface of the valve body assembly and the working direction of the strip is 10-45 degrees, and at least one compressible sealing element surrounds a channel outlet of the sealing surface of the valve body assembly. An included angle between the sealing surface of the valve plate assembly and the working direction of the strip is 10-45 degrees, and the sealing surface of the valve plate assembly is provided with compressible sealing elements corresponding to the sealing elements on the sealing surface of the valve body assembly. According to the vacuum slit valve, under the conditions that the strip is not damaged, vacuum sealing of different vacuum chamber parts is achieved.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating, and relates to a vacuum chamber isolation technology, in particular to a vacuum slit valve used for isolating a vacuum chamber in a roll-to-roll flexible strip vacuum coating production line. Background technique [0002] In the roll-to-roll flexible strip vacuum coating production line, the length of the strip is several thousand meters, and the two ends of the equipment are cylindrical feeding and unwinding tables. Due to the requirements of the film layer structure, the production line is tens of meters long. During the coating process, the strip is sequentially passed in and out of one or more vacuum chambers. At the end of production, the coating process area in the middle of the equipment needs to continue to maintain a vacuum state, while the retractable and unwinding table of the equipment needs to return to an atmospheric state. Therefore, the vacuum slit valve needs to realize t...

Claims

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Application Information

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IPC IPC(8): F16K1/00F16K1/42F16K1/36
CPCF16K1/00F16K1/36F16K1/42
Inventor 裴宏伟陈刚张浙军
Owner 威海斡兹真空科技有限公司
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