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Potential type gas sensor based on Li3PO4-Li4SiO4 mixed solid electrolyte and preparation method thereof

A technology of gas sensor and solid electrolyte, which is applied in the direction of instruments, scientific instruments, and material analysis through electromagnetic means, which can solve the problems of selectivity difference, unsatisfactory sensor response time, large power consumption, etc., and achieve improved sensitivity and good human performance. The effect of machine interaction and low power consumption

Active Publication Date: 2017-02-08
XI AN JIAOTONG UNIV +1
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

For example, based on NASICON, YSZ, Li 3 PO 4 Gas sensors such as solid electrolytes need to perform better at high temperatures and consume a lot of power; the response time of this type of sensor is not ideal; there are also differences in the selectivity of different gases

Method used

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  • Potential type gas sensor based on Li3PO4-Li4SiO4 mixed solid electrolyte and preparation method thereof
  • Potential type gas sensor based on Li3PO4-Li4SiO4 mixed solid electrolyte and preparation method thereof
  • Potential type gas sensor based on Li3PO4-Li4SiO4 mixed solid electrolyte and preparation method thereof

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Embodiment Construction

[0037] The invention will be further described in detail below in conjunction with the accompanying drawings and embodiments, but it is not used as a basis for any limitation on the invention.

[0038] Such as figure 1 As shown, the present invention is based on Li 3 PO 4 -Li 4 SiO 4 Potentiometric gas sensors with mixed solid electrolytes, including Al 2 o 3 ceramic substrate 3, and distributed in Al 2 o 3 The film type Pt resistance temperature measuring electrode 1 and the Pt heating electrode 2 under the ceramic substrate 3 are placed on the Al 2 o 3 Li is distributed over the ceramic substrate 3 3 PO 4 -Li 4 SiO 4 Hybrid solid electrolyte film 4, Li 3 PO 4 -Li 4 SiO 4 A reference electrode Au film 5 and a reaction electrode Au film 7 are distributed on the mixed solid electrolyte film 4 , and the reaction electrode Au film 7 is covered with a chemical material 6 as a reaction electrode.

[0039] See figure 2 As shown, the width ratio of the reaction ele...

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Abstract

The invention discloses a potential type gas sensor based on a Li3PO4-Li4SiO4 mixed solid electrolyte and a preparation method thereof. The preparation method comprises the following steps: preparing a membrane type Pt resistance temperature measurement electrode and a Pt heating electrode by a silk-screen printing method on an Al2O3 ceramic substrate; depositing a Li3PO4-Li4SiO4 mixed solid electrode film on the polished surface of the Al2O3 ceramic substrate by an electron beam evaporation coating technology; and depositing an electrode Au film by a magnetron sputtering method, and printing a chemical material on the surface of the electrode Au film to form a potential type gas sensor of solid electrolyte finally. In the sensor, a Li3PO4-Li4SiO4 mixed solid electrolyte layer is adopted, and the ionic conductivity at relatively low temperature can reach the level of Li3PO4 solid electrolyte at relatively high temperature; and moreover, with a closed-loop temperature control system, multiple functions of reducing the sensor working temperature, lowering the power consumption, increasing the response rate, enhancing the output stability, realizing time control and output and the like are improved.

Description

technical field [0001] The invention relates to a Li-based 3 PO 4 -Li 4 SiO 4 The structural design and hardware preparation method of the potentiometric gas sensor with mixed solid electrolyte. Background technique [0002] With the rapid development of MEMS technology, micro-nano manufacturing technology has gradually matured, and it has attracted much attention because of its small size, low power consumption, and good performance. Gas sensors based on MEMS technology are also developing in the direction of stabilization, integration, and reliability, and are expected to replace the important position of traditional macroscopic gas sensors in the fields of industry, agriculture, and public facilities. Compared with traditional liquid electrolytes, solid electrolytes have the advantages of high safety, stable performance, convenient storage and transportation, and long service life, so they have become a research hotspot. [0003] The research on gas sensors based on ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/407
CPCG01N27/4075
Inventor 王海容张咪陈迪
Owner XI AN JIAOTONG UNIV
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