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Flexible graphene composite material pressure sensor and preparation method thereof

A technology of pressure sensor and composite material, which is applied in the direction of fluid pressure measurement, instrument, and measurement force by changing the ohmic resistance. Focus on the effect

Active Publication Date: 2017-02-08
CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to overcome the shortcomings of the above-mentioned background technology, provide a flexible graphene composite pressure sensor and its preparation method, and solve the problem that the pressure sensor is difficult to make a flexible, bendable, portable and portable form and the circuit diagram is difficult to pattern , and this method is suitable for industrial production

Method used

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  • Flexible graphene composite material pressure sensor and preparation method thereof
  • Flexible graphene composite material pressure sensor and preparation method thereof
  • Flexible graphene composite material pressure sensor and preparation method thereof

Examples

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Embodiment 1

[0058] A flexible graphene composite pressure sensor, its top view is as follows figure 1 As shown, the cross-sectional view is as figure 2 As shown, it includes: a flexible substrate 10, electrodes and metal wiring, a force sensitive resistor layer, and a reference resistor layer; the flexible substrate 10 is at the bottom layer, and the electrodes and metal wiring are on the flexible substrate 10; Layer and reference resistance layer are above the electrodes and metal wiring; the schematic diagram of the electrode and metal wiring circuit is shown in image 3 shown.

[0059] There are 8 electrodes in total, electrode a1 and electrode b2 are adjacent to two electrodes of the same resistance, electrodes c3 and electrode d4 are adjacent to two electrodes of the same resistance, electrodes e5 and electrode f6 are adjacent to two electrodes of the same resistance, electrodes g7 and The electrode h8 is adjacent to two electrodes of the same resistance; the electrode a1 and the ...

Embodiment 2

[0100] A flexible graphene composite pressure sensor, its top view is as follows figure 1 As shown, the cross-sectional view is as figure 2 As shown, it includes: a flexible substrate 10, electrodes and metal wiring, a force sensitive resistor layer, and a reference resistor layer; the flexible substrate 10 is at the bottom layer, and the electrodes and metal wiring are on the flexible substrate 10; Layer and reference resistance layer are above the electrodes and metal wiring; the schematic diagram of the electrode and metal wiring circuit is shown in image 3 shown.

[0101] There are 8 electrodes in total, electrode a1 and electrode b2 are adjacent to two electrodes of the same resistance, electrodes c3 and electrode d4 are adjacent to two electrodes of the same resistance, electrodes e5 and electrode f6 are adjacent to two electrodes of the same resistance, electrodes g7 and The electrode h8 is adjacent to two electrodes of the same resistance; the electrode a1 and the ...

Embodiment 3

[0142] A flexible graphene composite pressure sensor, its top view is as follows figure 1 As shown, the cross-sectional view is as figure 2 As shown, it includes: a flexible substrate 10, electrodes and metal wiring, a force sensitive resistor layer, and a reference resistor layer; the flexible substrate 10 is at the bottom layer, and the electrodes and metal wiring are on the flexible substrate 10; Layer and reference resistance layer are above the electrodes and metal wiring; the schematic diagram of the electrode and metal wiring circuit is shown in image 3 shown.

[0143] There are 8 electrodes in total, electrode a1 and electrode b2 are adjacent to two electrodes of the same resistance, electrodes c3 and electrode d4 are adjacent to two electrodes of the same resistance, electrodes e5 and electrode f6 are adjacent to two electrodes of the same resistance, electrodes g7 and The electrode h8 is adjacent to two electrodes of the same resistance; the electrode a1 and the ...

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Abstract

The invention discloses a flexible graphene composite material silk screen printing pressure sensor and a preparation method thereof. The flexible graphene composite material silk screen printing pressure sensor comprises a flexible substrate, an electrode and metal interconnection line, a force-sensitive resistive layer and a reference resistive layer. The electrode and metal interconnection line, the force-sensitive resistive layer and the reference resistive layer are printed on the flexible substrate in turn through the mode of silk screen printing. The invention also discloses a preparation method of the flexible graphene composite material silk screen printing pressure sensor. The method is characterized in that the required sensor and the circuit thereof are enabled to be graphical so as to perform large-scale industrial production. The senor is light and flexible and has the advantages of being wearable, attachable and great in tensile deformation performance.

Description

technical field [0001] The invention belongs to the field of sensors and preparation methods thereof, in particular to a flexible graphene composite material pressure sensor and a preparation method thereof. Background technique [0002] In recent years, with the development of flexible electronics, electronic skin has great development prospects in the fields of medical treatment, military affairs, and artificial intelligence. Flexible sensors are an important support for electronic skin. Therefore, how to prepare flexible sensors with excellent performance, unique structure, high sensitivity, and mass production has attracted widespread attention at home and abroad. [0003] Traditional pressure sensors are mostly silicon-based pressure sensors. Since its substrate is a non-flexible material, it is not suitable for electronic skin. The silicon-based pressure sensor uses a Wheatstone bridge structure to measure its resistance change. The Wheatstone bridge structure has th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/22G01L9/04
CPCG01L1/22G01L9/04
Inventor 孙泰魏大鹏罗实于乐泳胡云杨俊史浩飞杜春雷
Owner CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI
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