Conductive film on second surface of automobile electrochromic interior rearview mirror and production method thereof
An electrochromic and interior rearview mirror technology, applied in optical components, optics, instruments, etc., can solve problems such as difficult to achieve specular reflection color and difficult to meet customer requirements
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Embodiment 1
[0020] The float glass is washed and dried.
[0021] Using silane and methane as reaction gases, a layer of SiC nanoparticles containing 1100Å, Eu 2 o 3 The nanoparticle layer is 1000Å, and the ITO layer is 1000Å; the specific preparation process parameters are:
[0022] RF power density: 700W / cm 2 , RF frequency: 12.55 MHz, deposition temperature: 280°C, deposition pressure: 120Pa, flow rate of silane diluted 12% (volume percentage) with hydrogen: 40 sccm, flow rate of methane (purity: 99.9995%): 50 sccm.
[0023] The transflective and semitransparent ITO conductive glass with required reflectance of 45% was obtained.
Embodiment 2
[0025] The float glass is washed and dried.
[0026] Using silane and methane as reaction gases, a layer of SiC nanoparticles containing 500Å, Eu 2 o 3 Nanoparticle layer 600Å; SiC nanoparticle layer 300Å, WO 3 The nanoparticle layer is 800Å; the ITO layer is 1200Å; the specific preparation process parameters are:
[0027] RF power density: 400 W / cm 2 , RF frequency: 13.56 MHz, deposition temperature: 300°C, deposition pressure: 70 Pa, hydrogen diluted 10% (volume percentage) silane flow rate: 30 sccm, methane (purity: 99.9995%) flow rate: 40 sccm. A transflective and semitransparent ITO conductive glass with a required reflectivity of 52.8% was obtained.
Embodiment 3
[0029] The float glass is washed and dried.
[0030] Using silane and methane as reaction gases, a layer of SiC nanoparticles containing 200Å, Eu 2 o 3 Nanoparticle layer 350Å; SiC nanoparticle layer 300Å, WO 3 Nanoparticle layer 250Å; SiC nanoparticle layer 400Å, Eu 2 o 3 The nanoparticle layer is 150Å; the ITO layer is 1600Å; the specific preparation process parameters are:
[0031] RF power density: 520 W / cm 2 , RF frequency: 13.56 MHz, deposition temperature: 280°C, deposition pressure: 80Pa, silane flow rate diluted 10% (volume percentage) with hydrogen: 50 sccm, methane (purity: 99.9995%) flow rate: 60 sccm.
[0032] A transflective and semitransparent ITO conductive glass with a required reflectivity of 55.1% was obtained.
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