Suspension positioning mechanism

Abstract

The invention discloses a suspension positioning mechanism, which comprises a motion assembly and a fixed assembly, and is characterized in that the motion assembly comprises a body, at least two contact blocks arranged at one side of the body, a groove, a hook with one end being accommodated in the groove, and a plurality of height adjustable sliding wheel assemblies arranged at the bottom of the body; one side of the fixed assembly comprises supporting assemblies, a lifting assembly, a hook positioning assembly, a hook shifting lever assembly, an X-direction positioning member and a Y-direction positioning member, wherein the supporting assemblies and the lifting assembly are matched with the contact blocks, the hook positioning assembly and the hook shifting lever assembly are matched with the hook, and the X-direction positioning member and the Y-direction positioning member are used for positioning the motion assembly. According to the invention, the positioning stability and the reliability of the motion assembly can be effectively improved through setting the contact blocks and the supporting assemblies with a balancing function, and the lifting assembly is set at the same time so as to improve the repeat positioning, assembling and disassembling speed of an optical system; and the plurality of height adjustable sliding wheel assemblies are adopted, so that the overall position of the motion assembly is effectively adjusted, the motion assembly is prevented from colliding with a part above the fixed assembly in the positioning process, the operation is simple and convenient, and the effect is stable and reliable.

Description

technical field [0001] The invention relates to the field of positioning of optical systems, in particular to a suspension positioning mechanism. Background technique [0002] Positioning of a moving module relative to a stationary module is often required in semiconductor manufacturing. Usually, due to limitations such as space structure, in the docking of the optical system, it is often necessary to fix and position the side of the system. Due to the requirements of the entire assembly, testing, transportation and maintenance of the optical system, multiple disassembly and positioning are often required between the systems, which requires the positioning mechanism to meet high repeat positioning accuracy. [0003] In traditional side positioning devices, tooling is generally used for positioning. This positioning method is to first install a tooling on the fixed component, then move the moving component to the tooling, combine the moving component with the fixed componen...

AI Technical Summary

Problems solved by technology

However, there are still three problems with this positioning device: one is that two fixed planes are used for side positioning, and the positioning accuracy is low; the other is that there is no lifting mechanism for disassembly, and it is not easy to disassemble and assemble the moving parts; The rollers have no adjustment function, and there is a risk of collision with parts above the fixed components during assembly

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