Nano-micro positioning platform

Abstract

The invention discloses a nan-micro positioning platform which comprises motion input devices, a flexible motion platform and a platform base used for fixing the flexible motion platform; the motion input devices are connected with one side of the flexible motion platform through a first input lever; the flexible motion platform is connected with an output platform through a flexible hinge; the front end of the first input lever is connected with the platform base; the middle section of the first input lever is equipped with a first input table connected with a first motion input device; the tail end of the first input lever is equipped with a second input table connected with a second motion input device; and the other side of the tail end of the first input lever is connected with the flexible motion platform. According to the nan-micro positioning platform disclosed by the invention, different input platforms are separately arranged on different positions of levers for inputting displacement; displacement is input from different positions of the input platforms, and the first input lever is used for transmitting motion, so that different displacement magnification times can be realized, and correspondingly, displacement output precision is different, and therefore, the nano-micro positioning platform can meet needs on different output stroke times and different precision under different application scenes.

Description

technical field [0001] The invention relates to the technical field of mechanical displacement amplification equipment, and more specifically, to a nano-micro positioning platform. Background technique [0002] With the increasing development of science and technology and the continuous improvement of nanotechnology, in order to pursue a better quality of life, many fields put forward higher requirements for nano-micron positioning platforms. For example, ultra-precision processing manufacturing, biological cell engineering, chip lithography machines and wire sewing machines all have high precision requirements for nano-micro platforms. [0003] In the field of nano-micro-positioning platforms driven by precision drives, precision and travel are the main bottlenecks for its further development and application. At present, the method to achieve large stroke and high positioning accuracy of the motion platform is to use a macro-micro two-stage worktable, the macro-motion stag...

AI Technical Summary

Problems solved by technology

[0006] In view of this, the object of the present invention is to provide a nano-micro positioning platform, the structural design of the nano-micro positioning platform can effectively solve the problem that the existing nano-micro positioning output device is difficult to meet the positioning requirements of different precision and output strokes, etc. question

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