branched fluorinated photopolymer

A photopolymer, polymer technology, application to photopolymer compositions having improved, researched or developed claims
In the field of 0004, problems such as adoption can be solved, and the effects of improving contrast, improving stripping rate, and improving photosensitivity can be achieved

Active Publication Date: 2018-09-21
ORTHOGONAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although good progress has been made in orthogonal processes, the disclosed system has not been commercially adopted

Method used

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  • branched fluorinated photopolymer
  • branched fluorinated photopolymer
  • branched fluorinated photopolymer

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Experimental program
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Effect test

specific Embodiment approach

[0097] Some non-limiting embodiments of the present disclosure include, but are not limited to the following.

[0098] 1. A fluorinated photopolymer composition comprising:

[0099] a branched copolymer comprising a branch unit, a first repeat unit having a fluorine-containing group, and a second repeat unit having a solubility-altering reactive group; and

[0100] Fluorinated solvents.

[0101] 2. The composition of embodiment 1, further comprising a sensitizing dye.

[0102] 3. The composition of embodiment 2, wherein the sensitizing dye is attached to the branched copolymer as an additional repeat unit.

[0103] 4. The composition of any one of embodiments 1 to 3, wherein the copolymer comprises chain-terminating sulfur- or bromine-containing groups.

[0104] 5. The composition of any one of embodiments 1 to 4, wherein the mole % of branching units relative to the total amount of all copolymer units ranges from 0.5% to 10%.

[0105] 6. The composition of any one of embo...

Embodiment

[0128] Comparative Composition 1

[0129] Copolymers without branch units are formed by the polymerization of 1H,1H,2H,2H-perfluorooctyl methacrylate (“FOMA”) as the first monomer with fluorine-containing groups, methyl Tert-butyl acrylate ("TBMA") as the second monomer with solubility-altering reactive groups and 9-anthrylmethyl methacrylate ("AMMA") as the monomer with the sensitizing dye. The relative ratios of the three monomers are 49.9 mol% / 48.0 mol% / 2.1 mol%, respectively, and the polymerization reaction is carried out in a hydrofluoroether solvent. The total amount of fluorine content of the copolymer was 42.5% by weight relative to the total weight of the copolymer. Comparative Composition 1 also contained 0.8% by weight (relative to the total weight of the copolymer) of PAG added to the solution. The following procedure can be used.

[0130] A clean, dry 1L four-neck jacketed reactor was equipped with a mechanical stirrer with Teflon blades, a reflux condenser wit...

Embodiment 2

[0141] The branched fluorinated photopolymer was spin-coated onto a silicon wafer and then soft baked at 90°C for 60 seconds. The photopolymer layer is about 1.4 μm thick. The photopolymer solution contained HFE-6512 as coating solvent, CGI 1907 as PAG (0.8% by weight relative to polymer weight), and FOMA, TBMA in molar ratios of 27.3, 30.4, 37.3, 3 and 2, respectively , a branched fluorinated polymer of a copolymer of ECPMA, EGDMA (ethylene glycol dimethacrylate) and AMMA. The photopolymer has 28% by weight of fluorine relative to the weight of the polymer. Contrast curves were measured as described above using HFE-7200 as the developer. The process was then repeated for various mixtures of HFE-7200 and HFE-7600, and various parameters were determined, as reported in Table 2. Note that if the low exposure is completely removed and when E maxWhen the etch is less than 0.25, only the maximum contrast value is reported. In Table 2, the "Clear Time" item for pure HFE-7600 is...

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Abstract

A fluorinated photopolymer composition having a branched copolymer provided in a fluorinated solvent is disclosed. The copolymer comprises a branching unit, a first repeating unit having a fluorine-containing group, and a second repeating unit having a solubility-altering reactive group. Branched fluorinated photopolymer compositions are particularly useful in the fabrication of organic and bioelectronic or other devices with sensitive active organic materials.

Description

[0001] Cross References to Related Applications [0002] This application is a PCT International Patent Application filed November 12, 2014 and claims priority to U.S. Provisional Application No. 61 / 903,450 filed November 13, 2013 and U.S. Provisional Application No. 61 / 903,450 filed May 9, 2014 Priority to Application No. 61 / 990,966, the disclosure of which is hereby incorporated by reference in its entirety. [0003] Statement Regarding Federally Sponsored Research or Development [0004] This invention was made with government support under SBIR Phase II Grant No. 1230454 awarded by the National Science Foundation (NSF). The government may have certain rights in this invention. Background technique [0005] The present disclosure relates to branched fluorinated photopolymers. Such photopolymers are particularly useful in organic and bioelectronic devices. [0006] Photopatternable polymer compositions have many possible commercial applications. They can be used as phot...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C08L33/16C08L51/00C08F220/22C08F265/06C08J3/02G03F7/004
CPCG03F7/0045G03F7/0046G03F7/0048G03F7/0392G03F7/0397G03F7/325G03F7/038H10K71/20H10K85/151
Inventor 道格拉斯·罗伯特·罗贝洛查尔斯·瓦伦·赖特黛安娜·卡罗尔·弗里曼弗兰克·沙维尔·伯恩约翰·安德鲁·德弗兰科尚德拉·吕布扎姆特伦斯·罗伯特·欧图尔
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