Material treatment device with plasma jet array cooperating with mechanical rotational motion

Abstract

The invention discloses a material treatment device with a plasma jet array cooperating with mechanical rotational motion. The material treatment device comprises a cavity, the jet array, a support and an object table; multiple even plasma jets generated by the jet array are coupled into large-area even low-temperature plasma through interaction among charged particles; a plasma generator is fixed above the object table through the support and can achieve multi-dimensional adjustment on the aspects of the direction, position and space. A speed-adjustable electric rotary disc is integrated in the object table, and constant-speed rotational motion of a material to be treated can be achieved. Plasma generation and material treatment can be carried out in the cavity according to actual needs. The plasma jet array is generated and cooperates with electrical, optical and mechanical engineering, the material can be treated evenly at a large area, and the device can be applied to study, teaching and industrial production popularization of material surface modification.

Description

Technical field: [0001] The invention belongs to the technical field of plasma material processing, and relates to a generation and application technology of discharge plasma, in particular to a material processing device in which a plasma jet array cooperates with mechanical rotation. Background technique: [0002] With the rapid development of industrial production, the requirements for the surface properties of materials in various industrial applications are also getting higher and higher. People have adopted a variety of methods to improve the surface properties of materials to meet different applications. In recent years, material modification based on atmospheric pressure low-temperature plasma technology has been more and more widely used. Because the low-temperature plasma contains a large number of active particles such as excited atoms, molecules, and OH radicals, its reactivity is extremely strong, and it is easy to have physical and chemical reactions with the s...

AI Technical Summary

Problems solved by technology

The plasma jet is generally generated in a medium tube and drawn out by the air flow. Its active area is usually small, and it is difficult to achieve large-area and uniform treatment of the surface of the material. In industrial applications, the uniformity of the surface properties of the material have higher requirements

Expanding the plasma jet into a jet array is a common way to expand the plasma area. Liu Jingquan (CN201510333396.6) of Shanghai Jiaotong University designed an adjustable device for the atmospheric pressure low-temperature plasma jet array, which can realize the plasma jet from a point The extension to the line, but it is still impossible to achieve large-area and uniform treatment of materials

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