Vertical constant current device with three-terminal protection function and manufacturing method thereof

Abstract

The invention provides a vertical constant current device with a three-terminal protection function and a manufacturing method thereof. The device comprises two parts of a vertical constant current diode and a transient voltage suppression diode. The vertical constant current diode part comprises a metal anode, a P-type substrate, a first lightly doped N-type epitaxial layer, a first P-type region, a second heavily doped N-type epitaxial layer, a first N-type heavily doped region and a first metal cathode. The transient voltage suppression diode structure comprises a metal anode, a P-type substrate, a first lightly doped N-type epitaxial layer, a second heavily doped N-type epitaxial layer, a second P-type region, an oxide layer and a second metal cathode. The transient voltage suppression diode and the vertical constant current diode are integrated together so that the constant current diode is enabled to have the anti-surge capability, the reliability of the constant current diode and the system can be enhanced, and appropriate breakdown voltage, clamp voltage and peak pulse current of the transient voltage suppression diode can be obtained by adjusting the doping junction depth and concentration of the second P-type region.

Description

technical field [0001] The invention belongs to the technical field of semiconductor power devices, and in particular relates to a vertical constant current device with protective functions at three terminals and a manufacturing method thereof. Background technique [0002] The constant current source is a commonly used electronic equipment and device, and it is widely used in electronic circuits. The constant current source is used to protect the entire circuit, even if the voltage is unstable or the load resistance changes greatly, it can ensure the stability of the supply current. However, the current high breakdown voltage of constant current diodes is generally 30-100V, so there is a problem of low breakdown voltage, and the constant current that can be provided is also low, and most constant current diodes cannot cope with the harsh external environment. , it is easy to burn out when it is struck by lightning or the large voltage and high current generated by the fluc...

AI Technical Summary

Problems solved by technology

However, the current high breakdown voltage of constant current diodes is generally 30-100V, so there is a problem of low breakdown voltage, and the constant current that can be provided is also low, and most constant current diodes cannot cope with the harsh external environment. , it is easy to burn out when it is struck by lightning or the large voltage and high current generated by the fluctuation of the power grid, which makes it difficult to guarantee the safety of the subsequent drive circuit. A transient voltage suppressor diode (TVS, Transient Voltage Suppressor) is integrated around the constant current diode ), the anti-surge capability of the constant current diode and the entire drive system can be enhanced, and the reliability is greatly improved

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