Accumulating type shield grid MOSFET integrating schottky diodes
A schottky diode, accumulation type technology, applied in the direction of electrical components, circuits, semiconductor devices, etc., can solve the problems of large leakage, complicated process steps, etc., achieve small on-resistance, reduce process steps, and reduce conduction voltage drop effect
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[0017] The present invention will be described in detail below in conjunction with the accompanying drawings.
[0018] An accumulation-type shielded gate MOSFET integrating Schottky diodes according to the present invention, such as figure 1 As shown, it includes a MOSFET region 12 and a Schottky region 13; the MOSFET region 12 and the Schottky region 13 both include a first metal layer 11, an N++ type heavily doped substrate 1, an N+ type drift region 2, N-type doped region 3 and second metal layer 10; the N-type doped region 3 of the MOSFET region 12 has a first groove 5 and an N+ type heavily doped region 4; the N+ The upper surface of the type heavily doped region 4 is in contact with the second metal layer 10; the first groove 5 is located between the N+ type heavily doped region 4, and the lower end of the first groove 5 extends into the N+ type drift region 2; The upper surface of the first groove 5 is in contact with the second metal layer 10, the first groove 5 is f...
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