Meter-scale grating diffraction wave-front splicing detection device and detection method

Abstract

A meter-scale grating diffraction wave-front splicing detection device and a detection method are disclosed. The device comprises a Fizeau interferometer and an interferometer standard lens, and is characterized by further comprising an electronically-controlled air floating translation table, a two-dimensional adjustment object stage, a control system, and a computer, wherein the two-dimensional adjustment object stage is fixed to the electronically-controlled air floating translation table, the output end of the control system and the control end of the electronically-controlled air floating translation table are connected by a cable, the control system and the Fizeau interferometer are connected to the computer by data lines, the angle at which a meter-scale grating to be detected is placed is equal to the diffraction angle of the meter-scale grating to be detected, and the center height at which the meter-scale grating to be detected is fixed to the two-dimensional adjustment object stage is the same with the center height of the interferometer standard lens. The invention provides an effective means of detection for meter-scale gratings, and the test diameter of the original Fizeau interferometer is expanded. The meter-scale grating diffraction wave-front splicing detection device and the detection method have the characteristics of low cost, simple structure and high precision, and have great engineering application value.

Description

technical field [0001] The optical measurement of the present invention is particularly a meter-level grating diffraction wavefront splicing detection device and detection method. Background technique [0002] In research fields such as astrophysics and high-energy pulsed lasers, there is an urgent need for large-aperture planar diffraction gratings. The former needs to cooperate with the spectrometer grating of the telescope with an aperture of more than 10 meters. The latter uses the principle of chirped pulse amplification (CPA) to generate petawatt-level laser pulses, and requires a meter-level pulse compression grating. The most important application field is the inertial confinement nuclear system. Fusion (ICF), which may help solve the growing energy crisis. The maximum diameter of the meter-scale grating exceeds 1400mm×420mm, and the weight is nearly 250KG. From the optical cold processing of the substrate to the coating and then to the development of the grating, e...

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Problems solved by technology

In 2003, the American QED Technology Company successfully developed the SSI automatic splicing interferometer, which can detect plane, spherical and aspheric surfaces with a diameter of less than 200mm with high precision. However, there has been no literature report on the meter-level grating diffraction wavefront splicing detection device so far.

Chinese patent application number "CN200810113460.X" designed a large-diameter parabolic mirror detection system, which is aimed at the measurement of large-diameter parabolic mirrors, and cannot be used to detect the diffraction wavefront of meter-scale gratings

Chinese patent application number "CN201310098554.5" designed a method for detecting the surface shape of high-precision planar optical elements based on sub-aperture splicing. , nor can it be applied to the detection of meter-scale grating diffraction wavefront

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