Rhombus wedge-type orthogonal drive piezoelectric stick-slip linear motor and its composite excitation method

Abstract

The invention provides a rhombus oblique-wedge quadratured drive type piezoelectric stick-slip linear motor and a composite excitation method thereof to solve the problem that in an existing piezoelectric stick-slip linear motor, the mechanical output property is limited due to the fact that comprehensive regulation on friction force is difficult. The rhombus oblique-wedge quadratured drive type piezoelectric stick-slip linear motor is composed of an oblique-wedge stator, a preloading device, a mounting support and a rotor; the oblique-wedge stator adopts asymmetrical hinges of a wedged structure, lateral displacement is generated through an oblique-wedge rhombus motion converter and the ununiform axial rigidity distribution characteristic of a stator drive foot, the friction drive force is increased, and the friction resistance is decreased; meanwhile, friction regulation waves are overlapped into sawtooth drive waves in the rapid deformation stage of the stator, comprehensive regulation on the friction force is achieved, and the mechanical output characteristic of the piezoelectric stick-slip linear motor is significantly promoted. The rhombus oblique-wedge quadratured drive type piezoelectric stick-slip linear motor has the advantages of being simple in structure, high in precision, large in stroke and the like and has the good application prospect in the fields of micro-nano precise driving and positioning such as machining of precise medical instruments, optical precise instruments and semiconductors.

Description

technical field [0001] The invention relates to a rhombus oblique wedge type orthogonal drive piezoelectric stick-slip linear motor and a compound excitation method thereof, belonging to the technical field of micro-nano precision drive and positioning. Background technique [0002] Piezoelectric stick-slip linear motor is a kind of piezoelectric stick-slip linear motor that uses the inverse piezoelectric effect of piezoelectric elements to excite the vibrator (or stator) to generate micro-vibration under the excitation of an asymmetric electrical signal, and realizes mechanical energy output through the frictional coupling between the vibrator and the mover. precision micro-nano actuators. According to different driving working principles, piezoelectric stick-slip linear motors are mainly divided into two categories: resonant piezoelectric motors (also called ultrasonic motors) and non-resonant piezoelectric motors (also called piezoelectric stick-slip motors). Compared wi...

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Problems solved by technology

[0004] In order to solve the technical problems of the existing piezoelectric stick-slip linear motors, such as the difficulty in comprehensive regulation of the friction between the stator and the mover, the mechanical output characteristics are limited, the serrated-like uneven motion output is generated, and the output performance is deteriorated, etc., the present invention discloses A rhombohedral wedge-type orthogonal drive piezoelectric stick-slip linear motor and its compound excitation method

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