Device for continuously preparing two-dimensional nano tin films

Abstract

The invention discloses a device for continuously preparing two-dimensional nano tin films. The device comprises a feed chamber, a sample preparing chamber, a discharge chamber, and the like, wherein valves are arranged among the chambers; samples are conveyed among the chambers through conveying devices such as rollers or conveying belts; each chamber is connected with an independent vacuumizing device and an independent air pipeline; the sample preparing chamber is provided with a physical vapor deposition system, a chemical vapor deposition system, and the like; the feed chamber can be provided with a heating device or a plasma surface treatment system; and the discharge chamber can be provided with a heating device, and the like. According to the device, the whole device is provided with an automated control system for controlling the switching on and switching off of the valves among the chambers, sample transmission, operation of a vacuum system, gas flow, and the like; and the structure is simple, the working is reliable, a uniform graphene, transition metal sulfide, silylene, germylene or boron nitride two-dimensional nano tin film, and the like, can be continuously prepared in a large area, and the device is applicable to industrialized preparation of two-dimensional nano tin films.

Description

[0001] The patent application for this invention is accepted by the State Intellectual Property Office of the People's Republic of China. Application number: 201210095936.8, application date: April 02, 2012, applicant: Xu Mingsheng, invention name: a device for continuously preparing two-dimensional nano-films case application. technical field [0002] The invention relates to equipment for preparing two-dimensional nanometer films, in particular to equipment for continuously preparing two-dimensional nanometer membranes. Background technique [0003] Two-dimensional nanofilm refers to a new class of materials with two-dimensional planar features, also known as two-dimensional layered materials or two-dimensional crystals. The most typical two-dimensional layered material is the graphene film discovered in 2004[ Science 306,666 (2004), Nature 438,197(2005)]; previous theoretical studies believed that two-dimensional materials could not exist in reality due to thermodynami...

AI Technical Summary

Problems solved by technology

However, the quartz tube furnace only has the functions of simple heat treatment of the metal catalyst layer and the synthesis of graphene film on the existing metal catalyst layer, and cannot realize the surface treatment of the substrate material and the preparation of synthetic graphene on the substrate. The continuous process of catalytic layer and graphene film synthesis; this kind of conventional high-temperature furnace has poor controllability to the required gas when synthesizing two-dimensional nano-films

Moreover, the graphene film synthesized by a quartz tube furnace has structural defects, resulting in poor electron transport performance. The quartz tube furnace has severely restricted the application of two-dimensional nano-films such as graphene films.

At the same time, roll-to-roll (roll-to-roll) equipment is currently used to prepare graphene films, but due to the limitations of this equipment technology and the requirements of the two-dimensional nano-film preparation technology, roll-to-roll equipment technology preparation The performance of the graphene film is still poor[ Carbon 50, 2615 (2012)]

Images