Full-closed type light trap sensing control unit and manufacturing method therefor

Abstract

The invention discloses a full-closed type light trap sensing control unit and a manufacturing method therefor. The control unit comprises a cube micro-cavity for storing particles, a PDMS (polydimethylsiloxane) substrate with a common single-mode optical fiber channel, and a glass substrate for sealing. The glass substrate is provided with mark lines, and the mark lines are used for indicating the position of the center of a light trap and guaranteeing the relative position of the cube micro-cavity and the center of the light trap. The manufacturing method comprises the steps: the assembly of a square capillary tube, the preparation of the PDMS substrate, and the overall packaging. The control unit limits the movement range of particles through the micro-cavity, improves the capturing efficiency of particles, and isolates the external pollution and impact through the full-closed design.

Description

technical field [0001] The invention relates to the field of optical accelerometers, in particular to an on-chip integrated device of an optical trap accelerometer. Background technique [0002] The optical trap accelerometer is a branch of the optical accelerometer. It uses the tiny force generated by the light radiation to realize the suspended support for the mass block in the accelerometer, which eliminates various errors caused by the contact support method and reduces environmental sensitivity. sex. With the development of optoelectronic technology, the optical trap accelerometer gradually shows its development potential in high precision, high sensitivity and miniaturization. [0003] The chip optical trap sensing control unit is a crucial component in the optical trap accelerometer. The quality of its design directly affects the working efficiency, measurement accuracy and sensitivity of the optical trap accelerometer. Optical trap accelerometers require high-effi...

AI Technical Summary

Problems solved by technology

However, at present, the chip-type sensitive units developed by most manufacturers or research institutions are aimed at high-throughput experiments such as chemistry, biology, and medicine. They are semi-sealed chip-type units, which cannot achieve long-term stable capture of particles. particle position detection accuracy

Moreover, the microcavity space of the chip unit used in most space light traps is relatively large, and the particle capture efficiency is not high.

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