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Vacuum evaporation crucible

A crucible and evaporation technology, applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of material deterioration, gaseous molecules running away, sublimation rate instability, etc., to increase the contact area , The evaporation rate is stable, and the effect of improving the evaporation effect

Active Publication Date: 2016-06-08
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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AI Technical Summary

Problems solved by technology

from figure 1 It can be seen from the figure that after the material 100 is heated, the material 100 in contact with the inner wall 200 of the crucible sublimates, turns into gaseous molecules and runs away, and the remaining solid matter cannot flow, so that the remaining material 100 cannot fully contact the inner wall 200 of the crucible, resulting in sublimation Unstable speed
If the device is running in a fixed rate mode, in order to maintain the sublimation rate, the device will continue to heat up to increase the temperature, which is very likely to exceed the cracking temperature of the material 100, resulting in material deterioration

Method used

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Embodiment Construction

[0028] In order to further illustrate the technical means adopted by the present invention and its effects, the following describes in detail in conjunction with preferred embodiments of the present invention and accompanying drawings.

[0029] see Figure 2-7 , which is the first embodiment of the evaporation crucible of the present invention, the evaporation crucible includes a crucible bottom 10 and a side wall 20 connected to the crucible bottom 10, the side wall 20 and the crucible bottom 10 enclose a A hollow chamber, the hollow chamber includes several blind holes 23 that are connected and extend in the same direction as the side wall 20. The inner surface of the side wall 20 includes several recessed The first arcuate surfaces 21 , the plurality of first arcuate surfaces 21 are respectively part of the hole walls of the plurality of blind holes 23 .

[0030] Specifically, the crucible bottom 10 and the side wall 20 are made of metal, such as titanium or aluminum.

[...

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Abstract

The invention provides a vacuum evaporation crucible which is obtained by machining a metal bar and removing materials. In the machining process of the metal bar, part of heat conducting structures capable of transferring heat to the middle of the crucible are reserved, for example, the contact area of a vacuum evaporation material and a crucible body is increased by increasing the inner surface area of the side wall of the crucible or additionally arranging heat conducting columns or heat conducting pieces and other heat conducting structures in the crucible, so that the vacuum evaporation material is evenly heated, the vacuum evaporation speed is constant, and the vacuum evaporation effect is improved.

Description

technical field [0001] The invention relates to the field of display technology, in particular to an evaporation crucible. Background technique [0002] OLED is a flat panel display technology with great development prospects. It has excellent display performance, especially self-illumination, simple structure, ultra-thin, fast response, wide viewing angle, low power consumption and flexible display. Known as the "dream display", coupled with the fact that its production equipment investment is much smaller than that of TFT-LCD, it has been favored by major display manufacturers and has become the main force of the third-generation display devices in the field of display technology. At present, OLED is on the eve of mass production. With the further deepening of research and the continuous emergence of new technologies, OLED display devices will surely have a breakthrough development. [0003] There are two process routes for the preparation of thin films of OLED organic ma...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
CPCC23C14/243
Inventor 刘亚伟刘扬
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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