Method for optimizing thickness of baffle layer of blocking impurity band detector

Abstract

The invention provides a method for optimizing thickness of a baffle layer of a blocking impurity band detector. The method comprises the following steps of acquiring optimal thickness of the baffle layer of the blocking impurity band detector. By the thickness, the detector can acquire high response rate and also has low noise, and the high-performance blocking impurity detector is designed and fabricated according to the optimized result. The method has the advantages that the corresponding optimal thickness of the baffle layer can be extracted with regard to blocking impurity band detectors obtained through different material systems and different epitaxial processes, the detector designed therefrom can have optimal value in performance, thus, repeated test piece is prevented in order to improve the device performance, and the development cost is greatly reduced.

Description

technical field [0001] The invention relates to semiconductor photodetector technology, in particular to a method for optimizing the thickness of a blocking layer of a detector blocking an impurity band. Background technique [0002] The emission spectrum of many cold targets in space is concentrated in the terahertz (THz) band, which cannot be detected by existing space-based infrared systems or ground-based radars. The space-based terahertz detection system can make up for this deficiency and greatly improve target detection. success rate. In recent years, space-based terahertz detection technology has developed rapidly, and its application fields involve atmospheric monitoring and astronomical observation. The reasons are as follows: [0003] 1) The rotation and vibration spectra of most material components in the atmosphere are located in the THz band; [0004] 2) The blackbody radiation peaks of planets, cosmic dust and newborn stars are all located in the THz spectru...

AI Technical Summary

Problems solved by technology

The performance of the BIB detector pursues high responsivity and low noise. The barrier layer, as a functional layer of its structure, has the function of suppressing noise, but the existence of the barrier layer will also reduce the responsivity of the detector, and the responsivity and noise affect the Sensitive to changes in barrier thickness

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