Double annealing technology of polycrystalline silicon ingot casting
A secondary annealing, polysilicon technology, applied in the direction of crystal growth, post-processing details, post-processing, etc., to achieve the effect of increasing the number of sheets, reducing debris, and improving mechanical properties
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Embodiment 1
[0014] Embodiment 1, a kind of secondary annealing process of polysilicon ingot, its steps are as follows:
[0015] (1) The silicon raw material is annealed for the first time after the heating, melting and crystal growth process in the ingot casting process. The annealing temperature is 1330°C and the temperature is kept for 1h;
[0016] (2) Lower the temperature of the silicon ingots after the first annealing by reducing the heating power and closing the heat shield, and then perform the second annealing.
Embodiment 2
[0017] Embodiment 2, a kind of secondary annealing process of polysilicon ingot, its steps are as follows:
[0018] (1) The silicon raw material is annealed for the first time after the heating, melting, and crystal growth processes in the ingot casting process. The annealing temperature is 1380 ° C and the temperature is kept for 2.5 hours;
[0019] (2) Lower the temperature of the silicon ingot after the first annealing by reducing the heating power and closing the heat shield, and then perform the second annealing.
Embodiment 3
[0020] Embodiment 3, a kind of secondary annealing process of polysilicon ingot, its steps are as follows:
[0021] (1) The silicon raw material is annealed for the first time after the heating, melting, and crystal growth processes in the ingot casting process. The annealing temperature is 1350 ° C and the temperature is kept for 2 hours;
[0022] (2) Lower the temperature of the silicon ingot after the first annealing by reducing the heating power and closing the heat shield, and then perform the second annealing, the annealing temperature is 1200 ° C, keep it for 1 hour, and then proceed to the subsequent process.
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