A Terahertz Spatial Phase Modulator Based on High Electron Mobility Transistor
A technology with high electron mobility and spatial phase, applied in the field of fast dynamic functional devices, can solve the problems that communication devices cannot be directly applied to the terahertz band, and achieve the effects of avoiding difficult processing, improving modulation depth, and being easy to manufacture
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[0025] The present invention combines HEMT and Metamaterials ingeniously and effectively into a triode structure, utilizes the high-speed dynamic characteristics of HEMT and the precise control ability of Metamaterials on electromagnetic waves, and rapidly controls artificial electromagnetic waves through the high electron mobility characteristics of the two-dimensional electron gas in HEMT. The resonant mode conversion of the medium enables the HEMT terahertz wave phase modulator to achieve a phase modulation depth of more than 90 degrees in a wider frequency band, realizing fast and efficient phase modulation of terahertz waves in space. Simulation calculation and experimental verification show that this is a HEMT terahertz fast phase modulation device with large phase modulation depth and wide modulation bandwidth, simple structure and easy processing.
[0026] The invention comprises a semiconductor substrate (1), an epitaxial layer (2), a modulation unit array (5), a posit...
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