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High-sensitivity capacitive-type pressure sensor and manufacturing method therefor

A pressure sensor, capacitive technology, applied in the fluid pressure measurement, instrument, measuring force and other directions using capacitance change, can solve the problems of complex electrode extraction, difficult process, poor linearity, etc., to improve capacitance detection sensitivity, process Simple, low power consumption

Active Publication Date: 2016-05-04
SOUTHEAST UNIV
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  • Abstract
  • Description
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Problems solved by technology

This kind of sensor has high sensitivity, but because the capacitance is inversely proportional to the spacing, the linearity is not good, and the two electrodes of the capacitor are usually not on the same plane, and the electrode extraction is more complicated, which makes the process difficult

Method used

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  • High-sensitivity capacitive-type pressure sensor and manufacturing method therefor
  • High-sensitivity capacitive-type pressure sensor and manufacturing method therefor
  • High-sensitivity capacitive-type pressure sensor and manufacturing method therefor

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Embodiment Construction

[0025] The present invention will be further described below in conjunction with the accompanying drawings.

[0026] The high-sensitivity capacitive pressure sensor provided by the present invention comprises a substrate 1, a pressure elastic film 2, a first fixed base 31, a second fixed base 32 and a third fixed base fixed on the substrate 1 respectively 33. Mechanical rod 4, support shaft 5, first interdigitated electrode 61 and second interdigitated electrode 62, first lead electrode 71 and second lead 72, insulating material 8, wherein,

[0027] The substrate 1 is provided with a pressure elastic membrane 2, the central upper surface of the pressure elastic membrane 2 is connected to one end of the first fixed base 31 through an insulating material 8, and the other end of the first fixed base 31 is connected to the end of the mechanical rod 4 One end connection;

[0028] On the surface of the substrate 1, a capacitive structure composed of a first interdigital electrode 6...

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Abstract

The invention provides a high-sensitivity capacitive-type pressure sensor and a manufacturing method therefor. The sensor comprises a substrate (1), a pressure elastic film (2), a first fixed base (31), a second fixed base (32), a third fixed base (33), a mechanical rod (4), a supporting shaft (5), a first interdigital electrode (61), a second interdigital electrode (62), a first lead electrode (71), a second lead electrode (72), and an insulating material (8), wherein the first, second and third fixed bases are fixed on a substrate (1), and the substrate (1) is provided with the pressure elastic film (2). The central upper surface of the pressure elastic film (2) is connected with one end of the first fixed base (31) through the insulating material (8). Meanwhile, the other end of the first fixed base (31) is connected with one end of the mechanical rod (4). According to the invention, the deformation of the pressure elastic film (2) can be amplified in a multiplied manner, thereby improving the capacitor detection sensitivity.

Description

technical field [0001] The invention is a pressure sensor structure based on capacitance change, especially a pressure sensor structure that makes capacitance change more sensitive through the principle that the thin film is deformed after receiving pressure and the deformation is amplified by a mechanical force conversion structure. Background technique [0002] Pressure sensor is the most commonly used sensor in industrial practice. It is widely used in various industrial automatic control environments, involving water conservancy and hydropower, railway transportation, intelligent buildings, production automatic control, aerospace, military industry, petrochemical, oil wells, electric power, ships, machine tools , pipeline and many other industries. The most widely used is the piezoresistive pressure sensor, which has extremely low price, high precision and good linear characteristics, but its temperature characteristics are poor, and it is often used in occasions with lo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/14G01L9/12
CPCG01L1/148G01L9/12
Inventor 秦明高磬雅穆林王庆贺黄庆安
Owner SOUTHEAST UNIV
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