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Nanometer device assembling device

A technology for assembling devices and nanodevices, which is applied in nanotechnology, nanotechnology, nanostructure manufacturing, etc., can solve the problem of insufficient precision and flexibility of nanorobot systems, hinder real-time control and precise positioning of nanomanipulators, and make it difficult to realize automation and Industrialization and other issues, to achieve real-time motion, micro-motion platform stability, and avoid damage

Inactive Publication Date: 2016-05-04
SUZHOU UNIV
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Problems solved by technology

However, limited by the observation space of the microscope, the precision and flexibility of the nano-robot system are insufficient, making the processing and assembly of three-dimensional nano-devices a huge challenge in the field of nano-manipulation; visual feedback and force feedback are limited by operating conditions, hindering the nano-manipulator. Real-time control and precise positioning make it difficult to realize automation and industrialization of nano-device processing and operation

Method used

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Embodiment Construction

[0024] The invention discloses a nano-device assembly device, which can realize functions including nano-operation, nano-measurement, nano-fabrication and nano-assembly, and meets the requirements of nano-device manufacturing.

[0025] The technical solutions in the embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0026] Such as Figure 1 to Figure 3 As shown, a nano-device assembly device 100 designed in the present invention includes at least one nano-manipulator, Figure 1 to Figure 3 An embodiment of the nano-device assembly apparatus 100 of...

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Abstract

A nanometer device assembling device comprises at least one nanometer manipulator. Each nanometer manipulator comprises a three-degree-of-freedom motion type micro-motion platform, a micro-nano-motion clamp arranged on the micro-motion platform, and a micro-nano piezoelectric motor controlling the micro-motion platform to conduct three-degree-of-freedom motion. The nanometer manipulators are integrated in a scanning electron microscope sample vacuum chamber (10-4 Pa), operation of one or more (smaller than or equal to four) nanometer manipulators is achieved based on real-time observation, each nanometer manipulator has three degrees of freedom, assembly of complicated three-dimensional nanometer devices can be achieved, and operation precision can be as high as 30 nanometers.

Description

technical field [0001] The invention relates to the technical field of micro-electro-mechanical systems, in particular to a nano device assembly device. Background technique [0002] Nanotechnology is an important science and technology that promotes the development of human society in the 21st century in terms of energy saving, consumption reduction, environmental protection, intelligence, convenience and healthy living. The core of nanotechnology is the manufacturing technology of three-dimensional nano-devices. The operation and assembly of three-dimensional nano-devices are characterized by high precision, high robustness, and high reliability. Therefore, overcoming the technical difficulties in the manufacture of three-dimensional nano-devices is an important issue and one of the biggest challenges in nano-manufacturing. Therefore, the design of mechanical devices for assembling nanodevices is a promising technology. [0003] At present, nano-manipulators based on obs...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B82B3/00B82Y40/00
CPCB82B3/0004B82Y40/00
Inventor 孙立宁陈之超杨湛陈涛
Owner SUZHOU UNIV
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