Microglass hemisphere resonant gyroscope and wafer-level fabrication method thereof

Abstract

The invention discloses a micro-glass hemispherical resonator gyro and a wafer level preparation method thereof. The micro-glass hemispherical resonator gyro comprises a composite structure substrate; a glass hemispherical resonator; a silicon non-planar electrode embedded in the composite structure substrate; and a packaging glass shell cover; wherein the glass hemispherical resonator consists of a hemispherical shell and a self-aligned column, and the inner surface of the hemispherical shell and the surface of the self-aligned column are coated with a metal conductive layer which is led out by connecting with a silicon leading out channel through another metal layer; the silicon leading out channel and the silicon non-planar electrode are led out on the back of the composite structure substrate by a metal wire. The preparation method includes wafer-level preparing the micro-glass hemispherical resonator by using a thermal foaming process, wafer-level preparing a glass-type silicon non-planar electrode by using a hot reflux process, assembling the glass hemispherical resonator and the glass-type silicon non-planar electrode, and performing vacuum packaging. The hemispherical resonator prepared by the invention has a diameter of 1-10mm, and has high electrode resonator alignment accuracy at the same time.

Description

technical field [0001] The invention relates to a Gothic vibrating gyroscope manufacturing technology in the field of micro-electromechanical systems (MEMS), in particular to a micro glass hemispherical resonant gyroscope and a wafer-level manufacturing method thereof. Background technique [0002] The development of microelectromechanical systems (MEMS) technology has miniaturized many mechanically prepared devices, bringing advantages such as volume reduction, cost reduction, and low power consumption. Since the Draper laboratory reported the first micromechanical silicon-based tuning fork vibrating gyroscope in 1991, the Gothic vibrating gyroscope has benefited from the miniaturization of MEMS technology and has been fully developed. Micromechanical vibrating gyroscopes have developed rapidly and are widely used in consumer products. electronic. At present, the performance of gyroscopes in consumer electronics is basically at the rate level. The performance of micro-mech...

AI Technical Summary

Problems solved by technology

However, the cost of hemispherical resonant gyroscopes processed by traditional machining is as high as US$50,000-100,000 per axis, and limited by the traditional precision processing technology and equipment of fused silica resonators, it becomes very difficult to manufacture hemispherical resonant gyroscopes with a diameter of less than 1cm.

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