A method for preparing rubrene thin films based on double-layer induction technology
A technology of rubrene and technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve problems such as poor film quality and complicated process
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[0008] Such as figure 1 As shown, Si substrate (1), SiO 2 Insulating layer (2), p-type hexabiphenyl (p-6P) first induction layer (3), α-4thiophene (α-4T) second induction layer (4), rubrene active layer (5) . Among them, SiO with an insulating layer thickness of 300nm 2 (2).
[0009] The specific implementation process: the substrate is composed of a substrate Si(1) and a layer of 300nm thick SiO on its surface. 2 (2) Composition; clean the substrate and put it into the reaction chamber of the seven-station OEL / EL photoelectric film joint preparation system; the vacuum degree of the reaction chamber is evacuated to less than 6.0×10 -4 Pa; the first induction layer p-6P(3) was vacuum evaporated on the substrate, the substrate temperature was 180°C, and the thickness was about 3nm; the second induction layer α-4T was vacuum evaporated on the first induction layer ( 4), the substrate temperature is 20°C, and the thickness is 30nm; a semiconductor layer rubrene (5) is vacuum ...
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