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A method for preparing rubrene thin films based on double-layer induction technology

A technology of rubrene and technology, applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve problems such as poor film quality and complicated process

Active Publication Date: 2017-09-12
CHANGCHUN UNIV OF TECH
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Problems solved by technology

[0005] The invention is a method for preparing rubrene film based on double-layer induction technology, the purpose of which is to overcome the problems of poor film quality and complicated process in the preparation of rubrene film

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  • A method for preparing rubrene thin films based on double-layer induction technology

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Embodiment Construction

[0008] Such as figure 1 As shown, Si substrate (1), SiO 2 Insulating layer (2), p-type hexabiphenyl (p-6P) first induction layer (3), α-4thiophene (α-4T) second induction layer (4), rubrene active layer (5) . Among them, SiO with an insulating layer thickness of 300nm 2 (2).

[0009] The specific implementation process: the substrate is composed of a substrate Si(1) and a layer of 300nm thick SiO on its surface. 2 (2) Composition; clean the substrate and put it into the reaction chamber of the seven-station OEL / EL photoelectric film joint preparation system; the vacuum degree of the reaction chamber is evacuated to less than 6.0×10 -4 Pa; the first induction layer p-6P(3) was vacuum evaporated on the substrate, the substrate temperature was 180°C, and the thickness was about 3nm; the second induction layer α-4T was vacuum evaporated on the first induction layer ( 4), the substrate temperature is 20°C, and the thickness is 30nm; a semiconductor layer rubrene (5) is vacuum ...

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Abstract

The present invention designs a preparation method for double-layer induced rubrene film growth, that is, the growth of rubrene film is induced by increasing the number of effective induction layers, and the epitaxial growth is highly ordered and high-quality on the high-quality double-layer induction layer. The crystalline rubrene film realizes the organic-organic epitaxial growth relationship by controlling the epitaxial layer growth behavior, crystallinity and film microstructure, and constructs a highly ordered and highly crystalline polycrystalline rubrene film to achieve to increase its mobility.

Description

technical field [0001] The invention relates to the technology for growing and preparing rubrene thin films, and belongs to the technical field of organic optoelectronics. Background technique [0002] As a high-mobility organic semiconductor material, rubrene (Rubrene, CH, 5.6.11.12-tetraphenyltetraphenyl) has attracted extensive attention in recent years. In the current related reports, its single crystal mobility is as high as 15-40cm 2 / Vs is the material with the highest carrier mobility among the organic semiconductors found so far. Moreover, rubrene has a low sublimation temperature, a narrow absorption spectrum and a very low absorption coefficient in the visible region. Therefore, in the research of devices based on organic semiconductor materials, rubrene is considered to be the most potential semiconductor. Material. However, related studies have found that it is very difficult to prepare high-quality large-area rubrene films. [0003] At present, the main thi...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L51/56
CPCH10K71/166
Inventor 王丽娟闫闯张玉婷孙丽晶王勇李占国
Owner CHANGCHUN UNIV OF TECH
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