Surface acoustic wave resonator type impedance sensor and surface acoustic wave resonator type impedance detection system

A surface acoustic wave and impedance detection technology, which is applied in impedance networks, uses electromagnetic/magnetic devices to transmit sensing components, electrical components, etc. The effect of improving the degree and reducing the package structure

Inactive Publication Date: 2016-02-10
MESNAC
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the technical problem that the existing surface acoustic wave sensor occupies a large volume, the present invention provides a surface acoustic wave resonator type impedance sensor

Method used

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  • Surface acoustic wave resonator type impedance sensor and surface acoustic wave resonator type impedance detection system
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  • Surface acoustic wave resonator type impedance sensor and surface acoustic wave resonator type impedance detection system

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Embodiment 1

[0026] Embodiment one, see figure 2 As shown, the present embodiment provides a surface acoustic wave resonator type impedance sensor, including a first antenna 101, a matching network 102, a reflection grid 103, and an interdigital transducer 104, at least the reflection grid 103, and an interdigital transducer The energy device 104 is arranged on the piezoelectric substrate 105, see image 3 As shown, the matching network 102 includes an optimal matching network composed of at least one capacitor and at least one inductor. The optimal matching network is also connected in parallel with an external sensor, and the external sensor is a capacitive or inductive sensor. The working principle of the surface acoustic wave resonator type impedance sensor of this embodiment is: the external sensor is a capacitive or inductive sensor, and the capacitive or inductive sensor is to convert the measured mechanical quantity, such as displacement, pressure, etc. For sensors with changing ...

Embodiment 2

[0028] Embodiment 2, this embodiment provides a schematic circuit diagram of a surface acoustic wave resonator type impedance sensor, see Figure 4 As shown, the optimal matching network is composed of the first capacitor C1 and the first inductor L1 connected in series, and the external sensors are connected in parallel at both ends of the series circuit composed of the optimal matching network.

[0029] where the external sensor can be as Figure 4 As shown, it is connected to the matching network through the outside of the wire, and it can also be connected as Figure 5 The integration shown in the matching network, the use of external or internal integration depends on the specific situation. For a relatively safe environment such as tire pressure detection, the external sensor can be integrated into the matching network. The product The high level of integration is conducive to reducing the packaging structure and reducing the overall volume of the sensor. For the detec...

Embodiment 3

[0030] Embodiment 3. This embodiment provides a schematic circuit diagram of a surface acoustic wave resonator-type impedance sensor. Since the external sensor is capacitive or inductive, no matter how it is connected to the matching network, it will Will change the reactance value of the matching network. This embodiment gives another way of incorporation, see Figure 6 As shown, the external sensor can also only be connected in parallel with the first inductor L1 to change the reactance value of the matching network. Of course, there are other combinations, which all belong to the protection scope of the present invention, and no examples will be given here.

[0031] The equivalent capacitive reactance of the matching network is C′, the equivalent inductive reactance L′, and the calculation method of the impedance value Zeq2 of the matching network is:

[0032] (1)

[0033] (2)

[0034] The general near-resonator equivalent circuit model of a resonator is as Figure 7...

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Abstract

The present invention discloses a surface acoustic wave resonator type impedance sensor and a surface acoustic wave resonator type impedance detection system. The surface acoustic wave resonator type impedance sensor comprises a first antenna, a matching network, a reflecting grating and an interdigital transducer. At least the reflecting grating and the interdigital transducer are arranged on a piezoelectric substrate. The matching network includes an optimal matching network consisting at least one capacitor and at least one inductor, and is connected in parallel with an external sensor. The external sensor is a capacitive sensor or an inductive sensor. According to the surface acoustic wave resonator type impedance sensor, an external sensor is accessed into a matching network, and the structure and the arrangement of a piezoelectric substrate cannot be changed so that the perceived performance of the sensor may be not influenced and the complexity and processing steps such as adding arrangement of pins and the like may not be increased; and moreover, the external sensor is able to be integrated into the matching network and has high integration level so that the packaging structure may be further reduced and the whole size of the sensor may be decreased.

Description

technical field [0001] The invention relates to an impedance sensor, in particular to a surface acoustic wave resonator type impedance sensor and a detection system. Background technique [0002] At present, in many special occasions, the connection between the sensor and the unit under test is usually impossible to achieve, and wireless sensors must be used to achieve measurement. The surface acoustic wave sensor uses external factors (such as temperature, pressure, magnetic field, electric field, etc.) A device that realizes sensing based on the transmission characteristics of surface waves. [0003] The working principle of the passive surface acoustic wave sensor is: first, the radio frequency interrogation unit sends out a high-frequency interrogation signal, which is received by the antenna directly connected to the interdigital transducer (IDT) on the surface acoustic wave chip and converted into an electrical signal. The interdigital transducer converts the electric...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D5/56
CPCG01D5/56H03H7/38H03H9/25
Inventor 董兰飞滕学志陈海军韦江波焦清国
Owner MESNAC
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