An integrated system of large-diameter ultra-precision grinding machine

Abstract

The invention discloses a large-aperture ultra-precise grinding machine integrated system. The large-aperture ultra-precise grinding machine integrated system comprises a Z-axis spindle box and an auxiliary two-dimension vibration laser scanning in-situ detection system which is detachably connected to the Z-axis spindle box; the auxiliary two-dimension vibration laser scanning in-situ detection system comprises a follow-up guide way, an X-axis guide way and follow-up guide way connecting parts which are matched and connected with the follow-up guide way; the follow-up guide way is parallel to the X-axis guide way and can slide back and forth in the direction of the X-axis guide way, and the follow-up guide way connecting parts keep still in the direction of an X axis. The large-aperture ultra-precise grinding machine integrated system further comprises an in-situ grinding wheel dressing device which can achieve in-situ automatic dressing of a cambered surface grinding wheel. The large-aperture ultra-precise grinding machine integrated system is an ultra-precise optical grinding machine which combines machining, detection and dressing and is oriented to large-aperture optical mirrors, a non-contact sensor is applied to the large-aperture optical mirror grinding machine, the detection efficiency and the machining efficiency can be greatly improved, and the errors caused during carrying of detected elements are reduced to the hilt.

Description

technical field [0001] The invention relates to a three-axis grinder, in particular to an integrated system of large-diameter ultra-precision grinders, which can realize processing, detection, reprocessing of large-diameter optical mirrors and in-situ dressing of grinding wheels, and belongs to the technical field of mechanical processing equipment. Background technique [0002] With the rapid development of modern military and aerospace and the continuous breakthrough of advanced manufacturing technology, more and more large optical mirrors have been applied, and the precision requirements are getting higher and higher, which also puts forward higher requirements for the performance of machine tools. However, when machining large-diameter optical mirrors on machine tools, in order to improve the machining accuracy, it is necessary to continuously process-test-process. At present, the large-caliber ultra-precision optical grinding machine has the following problems: 1. The s...

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Problems solved by technology

[0003] In order to solve the in-situ detection and overcome the problems of low detection efficiency, insufficient precision and high price, the object of the present invention is to provide an integrated system of large-caliber ultra-precision grinding machine, including a Z-axis headstock and detachably connected to the Z A two-dimensional vibration-assisted laser scanning in-position detection system on the shaft headstock; the two-dimensional vibration-assisted laser scanning in-position detection system includes the follow-up guide rail and the X-axis guide rail, and a follow-up guide rail matched with the follow-up guide rail A moving guide rail connector; the follower guide rail is parallel to the X-axis guide rail and can slide back and forth along the X-axis guide rail direction, while the follow-up guide rail connector remains stationary in the X-axis direction

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