Semiconductor production constraint control method

Abstract

The invention provides a semiconductor production constraint control method. The provided method is applied in a manufacturing execution system, constraint examples and corresponding constraint exceptions are added in a constraint detection module in the manufacturing execution system, each constraint example comprises a plurality of constraint factors, the constraint factors can be combined at will, and therefore a required constraint example is obtained. Thus the extendibility is strong, constraint types are free from specific constraint types, modification or updating of an on-line manufacturing execution system is not needed, and system performances are good.

Description

technical field [0001] The invention relates to the field of semiconductor device manufacturing, in particular to a semiconductor production constraint control method. Background technique [0002] The manufacturing process (Flow) of semiconductor wafers is very complicated, there are as many as hundreds of steps (Step), and the process recipe (Recipe) of each step is extremely diverse. Generally, the entire manufacturing process requires more than 80 kinds of equipment (Equipment ) are completed together, and in some key processes, there are also special requirements for auxiliary materials (such as the mask plate required for lithography). For foundries, the situation is even more complicated, because dozens of products from many customers must be processed online at the same time, and these products usually have different technological processes, and share equipment in some processes. , Some processes will also specify special processing equipment. Therefore, for such a...

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Problems solved by technology

[0004] 2) The customer requires that certain products (or batches) can only be used (or cannot be used) with certain equipment (or equipment cavity, or auxiliary materials);

[0005] 3) Process constraints, such as a temporary change of process requires that a product can only use a specific version of the process flow;

[0006] 4) Recipe constraints, some craft recipes need to be temporarily disabled due to special reasons;

[0010] 1. The scalability is poor. Once the constraint type is determined, its constraint factor is specified. When there is a new constraint type requirement, the system can only be re-modified and the online manufacturing execution system (MES) can be upgraded. However, in actual production , the risk of modifying the system is greater, and upgrading the system will affect production;

[0011] 2. Poor computing performance, because the conventional system management method will correspond each constraint type to a database table, usually a one-to-one relationship, so these tables must be checked one by one when checking the constraint conditions, so the performance is poor

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