Waveband selective enhancement quantum well infrared focal plane applied to hyperspectral imaging

A technology of hyperspectral imaging and trap infrared focus, which is applied in optical radiation measurement, measurement devices, radiation pyrometry, etc., can solve the problems of low optical coupling efficiency and inability to express resonance characteristics, and achieve improved response rate and response rate Effect

Active Publication Date: 2015-12-16
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the dielectric grating cannot exhibit resonance characteristics for optical coupling, the optical coupling efficiency is low

Method used

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  • Waveband selective enhancement quantum well infrared focal plane applied to hyperspectral imaging
  • Waveband selective enhancement quantum well infrared focal plane applied to hyperspectral imaging
  • Waveband selective enhancement quantum well infrared focal plane applied to hyperspectral imaging

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Effect test

Embodiment 1

[0028] Embodiment 1: By designing different line widths s for multiple pixels to achieve the resonance wavelength of different enhanced responsivity, the upper metal is a two-dimensional metal square array, and the line width s takes 7 different values, which are 5.1 . The value of the period p remains constant at 10 microns.

Embodiment 2

[0029] Embodiment 2: By designing different line widths s for multiple pixels to regulate the resonance wavelengths of different enhanced responsivity rates, the upper metal is a one-dimensional metal stripe array, and the line width s takes 7 different values, which are 5.1, 5.3, 5.5, 5.7, 5.9, 6.1, 6.3 microns, the corresponding resonance wavelengths are 13.0, 13.5, 13.8, 14.1, 14.4, 14.8, 15.2 microns respectively. The value of the period p is s+2 microns.

Embodiment 3

[0030] Embodiment 3: By designing different line widths s to achieve different resonance wavelengths of enhanced responsivity, the upper metal is a single metal stripe, and the line width s takes 7 different values, which are 5.1, 5.3, 5.5, and 5.7 respectively. , 5.9, 6.1, 6.3 microns, the corresponding resonance wavelengths are 13.0, 13.5, 13.8, 14.1, 14.4, 14.8, 15.2 microns, respectively. Only one plasmonic microcavity is placed in each pixel.

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Abstract

The invention discloses a waveband selective enhancement quantum well infrared focal plane applied to hyperspectral imaging. A plasmon micro cavity is integrated on a QWIP focal plane pixel, the micro cavity can effectively capture incident photons and localize the incident photons in the plasmon micro cavity to form a transversely-propagated fabry-perot resonating standing wave, coupling with the QWIP in the micro cavity is carried out, a light current is converted, and thus, the response rate performance of the focal plane device is enhanced. The central wavelength of the resonating standing wave is decided by the geometrical size of the micro cavity, micro cavities with different sizes are designed and prepared on different focal plane pixels to enable the pixels to have different response peak wavelengths, and pixel waveband selective response is formed. The selected wavebands and hyperspectral spectral bands are distributed on the focal plane pixel correspondingly, the pixel response rate of each waveband in the hyperspectral imaging application can be selectively enhanced, and the detection sensitivity of the entire hyperspectral imaging focal plane is thus enhanced.

Description

technical field [0001] The invention relates to an infrared focal plane detector that selectively enhances the responsivity of a quantum well infrared detector in hyperspectral imaging applications, specifically refers to a hyperspectral imaging quantum well infrared detector that enhances the responsivity by plasmon microcavity optical coupling. focal plane device. Background technique [0002] Spectral analysis, especially infrared spectral analysis, can reflect the atomic and molecular vibration information of the measured object, reveal its microstructure and chemical composition and other indicators, so it has become an important means in natural science research. Spectral imaging technology is a new photoelectric imaging detection technology. While detecting the optical intensity distribution of the target object, it also detects the corresponding spectral distribution of the object. Detection, but the band division of the spectrum is much finer. Spectral imaging has...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/09H01L27/146G01J5/20
CPCG01J5/20G01J2005/204H01L27/146H01L31/09
Inventor 李志锋景友亮陆卫李宁陈效双陈平平李天信王文娟甄红楼王少伟
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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