Detection system and method of coating membrane thickness

Abstract

Disclosed in the invention is a detection system of a coating membrane thickness. The system comprises a probe, a feedback circuit, a photoelectric detector, and a computer. The probe is used for scanning a PR membrane surface; the feedback circuit is used for controlling a scanning head to move at a vertical direction, so that the acting force between the probe and the PR membrane surface at each point is constant all the time during the scanning process; the photoelectric detector is used for converting a reflected laser beam into an electric pulse signal; and the computer is used for converting the electric pulse signal into an area that is either bright or dark to form original data of the PR membrane thickness. According to the invention, the measurement time is shorter; arrangement of a complex optical system is not required; the measurement and coating processes are carried out synchronously; real-time on-line measurement of the coating membrane thickness is realized; the coating membrane thickness can be controlled and adjusted in real time; and the system and method play a key role in realizing stability of the coating process monitoring.

Description

【Technical field】 [0001] The invention relates to the technical field of detection, in particular to a coating film thickness detection system and method. 【Background technique】 [0002] In the color film substrate coating process of TFT-LCD, the PR film thickness detection after coating by the coating machine is generally carried out by THK (ThicknessMeasure) optical measurement after vacuum drying and pre-baking process. There is a lag in the detection of cloth film thickness, and the occurrence of abnormal film thickness is usually not discovered in time. It takes a lot of time for confirmation and subsequent improvement work to reconfirm. With the market demand for high-precision and high-resolution products , the film thickness uniformity requirements on the color film substrate coating process are becoming more and more stringent, and the real-time monitoring of the coating film thickness Matrix distribution has become more important. There are certain disadvantages i...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a detection system and method for coating film thickness, aiming to solve the problem of hysteresis in film thickness inspection of THK optical measurement method in the prior art, while avoiding too long confirmation time and process parameters The impact of changes on product quality and yield improvement

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