Intensity correlated autocollimator for single-CCD

Abstract

The invention discloses an intensity correlated autocollimator for a single-CCD, including an optical system and an image acquisition system and a data processing module, wherein the optical system is composed of a laser, ground glass, a motor, a reticle, a first spectroscope, a second spectroscope, a first lens and a second lens, and the image acquisition system includes an area array CCD. The area array CCD receives an image signal which is sent at the same time from the optical system through triggering of a synchronous signal sent from the image acquisition system. The two paths of images, after being acquired by the image acquisition system, are subject to intensity correlated calculation and signal processing in the data processing module, and finally a reading is displayed. According to the invention, a reference light path is added the optical system and the overall appearance of the traditional autocollimator are kept, and implementation in terms of engineering is easy. According to the invention, the intensity correlated method of quantum imaging technology is also introduced to the design of the autocollimator, which, can effectively increase the resolution and accuracy of measurement, can reduce errors of measurement caused by air disturbances, and the like, and can increase the sensitivity and stability of the autocollimator.

Description

technical field [0001] The invention relates to a single-CCD intensity-correlated autocollimator, which belongs to the field of precision testing and measuring instruments. Background technique [0002] As a high-precision optical measuring instrument, the autocollimator can be used in many aspects such as angle measurement, flatness measurement, verticality measurement, etc. It is widely used in various fields such as machining, aerospace device processing and assembly, precision physical experiments, etc. . Most traditional autocollimator products use a combination of lens group and area array or linear array CCD for measurement. Therefore, in order to improve the measurement accuracy of the autocollimator in the prior art, it is generally necessary to increase the focal length of the lens group and reduce the size of the CCD pixel. Among them, the increase of the focal length of the lens group inevitably increases the volume of the autocollimator; and the reduction of t...

AI Technical Summary

Problems solved by technology

Among them, the increase of the focal length of the lens group inevitably increases the volume of the autocollimator; while reducing the size of the CCD pixel is limited by the processing and installation technology of the CCD pixel

At the same time, in practical applications, the irreconcilable contradiction between large range and high precision also greatly limits the application occasions of autocollimators.

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