Adjustment method and adjustment apparatus of ICP ion source flame detection position

Abstract

The present invention provides an adjustment method and an adjustment apparatus of the ICP ion source flame detection position. The adjustment method comprises: determining a detection region, determining an X-direction detection interval and a Y-direction detection interval according to the set voltage critical value, acquiring all detection points corresponding to the maximum X-direction detection voltage value, determining the optimal X-direction detection point through a dichotomie method, and determining the optimal Y-direction detection point by using the dichotomie method. According to the adjustment apparatus, the movements in the X direction and the Y direction are achieved through the stepping motor and the ball screw pair, the non-connecting ends of the stepping motor and the ball screw pair are respectively fixed on the sliding block of the guide rail sliding block pair and the rolling wheel, the X-direction ball screw pair and the Y-direction ball screw pair respectively form a threaded connection with the base, the photoelectric conversion module on the base receives the light of the filter to complete the photoelectric conversion, and the electrical signal is processed by the controller so as to control the stepping motor. According to the present invention, with the adjustment method and the adjustment apparatus, the adjustment of the optimal detection position can be rapidly achieved, and the characteristics of quick adjustment, accurate positioning and stable operation are provided.

Description

technical field [0001] The invention relates to an adjustment method and an adjustment device for an ICP ion source flame detection position, belonging to the technical field of ICP ion source detection. Background technique [0002] ICP ion source is a new type of light source developed in the 1960s. Due to its excellent performance, it developed rapidly and was widely used in the 1970s. Now it has been used in various industries, mainly for the detection and analysis of material components. Inductively coupled plasma atomic emission spectrometer is a commonly used analytical instrument, which uses the atomic or ion emission characteristic spectrum of the element under the heating of the ICP ion source to determine the composition of the substance, thereby performing qualitative or quantitative analysis of the element. Among them, the analysis of the spectrum is a very important link. When collecting the spectrum, the position of the flame of the ICP ion source and the posi...

AI Technical Summary

Problems solved by technology

However, the general ICP ion source lighting position is fixed, and it is difficult to ensure that it is in the best observation position most of the time

Or use the axial observation method to collect light, which will lead to large interference of the substrate and need to remove the tail flame, thus causing more problems

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