Large diameter high vacuum oil diffusion pump

Abstract

The invention discloses a diffusion pump, and particularly relates to a large-caliber high vacuum oil diffusion pump, which is suitable for a vacuum furnace and a vacuum coating machine. The large-caliber high vacuum oil diffusion pump comprises a pump body, and a pump core component arranged in the pump body, wherein a heater is arranged at the bottom of the pump body; an oil stop device is arranged in an exhaust port of the pump body; the pump body adopts a convex cavity structure; the pump core component is vertically mounted in a center oil tank in the pump body, and is formed into an integral structure by a first-stage guide pipe, a second-stage guide pipe and a third-stage guide pipe arranged in sequence from inside to outside; umbrella cap-shaped diffusion nozzles are respectively arranged at the upper parts of all the guide pipes; a spraying nozzle is vertically welded at the bottom of the third-stage guide pipe; the first-stage guide pipe is higher than the second-stage guide pipe; and the second-stage guide pipe is higher than the third-stage guide pipe. The large-caliber high vacuum oil diffusion pump has the characteristics of large caliber, high limit vacuum degree, high pumping rate, low oil return rate and low electricity consumption.

Description

technical field [0001] The invention relates to a diffusion pump, in particular to a large-diameter high-vacuum oil diffusion pump, which is suitable for use in vacuum furnaces and vacuum coating machines. Background technique [0002] High vacuum oil diffusion pump is a kind of jet vacuum pump, it works in the high vacuum area, with low pressure and high speed oil vapor as the working medium. The pumping process of the pump is a process in which the pumped gas diffuses into the oil vapor jet and is carried to the pump outlet for discharge. It is composed of pump body, pump core assembly, heater, oil retaining device and other components. Most of the pump body is made of carbon steel or stainless steel; the pump core assembly is composed of a nozzle and a guide tube, the pump core assembly is a key component of the high vacuum oil diffusion pump, and the material is mainly aluminum or stainless steel; Composed of thermal ceramic discs and heating components; an oil retaini...

AI Technical Summary

Problems solved by technology

[0003] Traditional high-vacuum oil diffusion pumps are mainly divided into two types according to the shape of the pump body, which are straight cavity and convex cavity, and the diameter is between 100-1000 mm. No high vacuum oil diffusion pump with a larger diameter than 1000 mm

Due to the fact that the high vacuum oil diffusion pump with the traditional technical structure cannot produce a vacuum pump with a larger diameter, its application field is limited

The pumping speed of the traditional high vacuum oil diffusion pump is small, the original pumping rate can only reach 32000L / s at most, the ultimate vacuum is low, and the ultimate vacuum degree is up to 7×10 -5 Pa, it takes a long time to reach the ultimate vacuum, the oil return rate is high, and the power consumption is large

Images