Signal transmission line structure and electronic device for its application
A technology for signal transmission lines and electronic devices, applied to printed circuit components and other directions, can solve the problems of limited overall volume and difficult design of transmission lines, and achieve the effect of reducing chip area, reducing signal transmission length, and low resistance value.
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[0072] refer to figure 1 and 2 The signal transmission line structure 10 includes: a substrate 110 , a plurality of through-silicon via (TSV) trenches 130 a, 132 a, and conductive substances 130 b, 132 b. Two TSV trenches are taken as an example below.
[0073] The substrate 110 has a first surface 110a and a second surface 110b, and the first surface 110a and the second surface 110b are opposed to each other. In other words, the first surface 110a of the substrate 110 is the upper surface, and the second surface 110b of the substrate 110 is the lower surface.
[0074]TSV trenches 130 a and 132 a are formed on the first surface 110 a of the substrate 110 . Each TSV trench 130a, 132a extends its length L1 along the first surface 110a. In other words, the TSV trenches 130a, 132a are elongated.
[0075] Each TSV trench 130 a , 132 a extends downwards (towards the second surface 110 b ) to a depth H1 from the first surface 110 a , but does not penetrate the substrate 110 . H...
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