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A high-precision surface shape control device for an x-ray band optical element

An optical element and surface shape control technology, applied in the field of X-ray optics, can solve problems such as excessive local surface shape errors, and achieve the effect of simple bending deformation

Inactive Publication Date: 2017-07-14
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

[0004] The purpose of the present invention is to propose a high-precision surface shape control device for X-ray band optical elements, which solves the problems in the prior art that can only suppress the cylindrical surface shape with a large radius of curvature, and there will be local surface shape during the bending process. The problem of too much error

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  • A high-precision surface shape control device for an x-ray band optical element
  • A high-precision surface shape control device for an x-ray band optical element

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Embodiment Construction

[0017] Embodiments of the present invention will be further described below in conjunction with the accompanying drawings.

[0018] See attached figure 1 And attached figure 2 , a high-precision surface shape control device for an X-ray band optical element of the present invention includes a driving roller 1, a driven roller 2, an ultra-high-precision displacement control device and a control system;

[0019] The two driving rollers 1 are respectively located above the optical surfaces at both ends of the optical element 6, and the driving roller 1 has three degrees of freedom, including the degree of freedom of rotation along its axis, the degree of freedom along the surface perpendicular to the surface of the optical element 6 and degrees of freedom along the surface of the parallel optical element 6;

[0020] The two driven rollers 2 are respectively located below the bottoms at both ends of the optical element 6, and the driven rollers 2 have one degree of freedom, tha...

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Abstract

A high-precision surface shape control device for X-ray band optical elements belongs to the technical field of X-ray optics. The problem of excessive surface error. The invention includes a driving roller, a driven roller, an ultra-high-precision displacement control device and a control system; the two driving rollers are respectively located above the optical surfaces at both ends of the optical element, and the driving roller has three degrees of freedom, including freedom of rotation along its axis degree, along the degree of freedom perpendicular to the surface of the optical element and the degree of freedom along the surface of the parallel optical element; two driven rollers are respectively located under the bottom of both ends of the optical element, and the driven roller has a degree of freedom, that is, rotation along its axis Degree of freedom; multiple ultra-high-precision displacement control devices are evenly installed on the optical element base plate, and the control system controls the displacement of multiple ultra-high-precision displacement control devices.

Description

technical field [0001] The invention belongs to the technical field of X-ray optics, and in particular relates to a high-precision surface shape control device for X-ray wave band optical elements, which is used to control the deformation of large curvature radius of optical elements and has the function of compensating local surface shape errors. Background technique [0002] In the field of synchrotron radiation beamlines and EUV lithography, various optical elements with complex surface shapes are required. The main reflective surface shapes are plane, cylinder, torus, sphere, parabola and ellipsoid. According to different application environments and different requirements for optical components, different processing methods can be used to obtain the required surface shape. There are two main processing methods: grinding and bending deformation. Compared with grinding, bending deformation has the advantages of adjustable radius, high surface precision and easy manufactu...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
Inventor 龚学鹏卢启鹏彭忠琦王依
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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