Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Two-dimensional magnetic field probe table measuring system

A two-dimensional magnetic field and measurement system technology, which is applied in the measurement of magnetic properties, etc., can solve the problems that the magnetic field probe station cannot change the direction of the magnetic field, and the number of probe holders and probes is small, achieving high cost performance, small mechanical vibration, and reduced The effect of cable vibration

Active Publication Date: 2015-09-30
INST OF ELECTRONICS ENG CHINA ACAD OF ENG PHYSICS
View PDF7 Cites 13 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to propose a two-dimensional magnetic field probe station measurement system to solve the problem that the existing magnetic field probe station cannot change the direction of the magnetic field and can place fewer probe bases and probes, and can effectively change the direction of the magnetic field. It is necessary to set the number of probe bases and probes, which can be widely used in various scenarios of physical and semiconductor measurement

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Two-dimensional magnetic field probe table measuring system
  • Two-dimensional magnetic field probe table measuring system
  • Two-dimensional magnetic field probe table measuring system

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0032] The invention provides a two-dimensional magnetic field probe station measurement system, the overall structure is as follows figure 1 As shown, it includes: a base 1 for carrying and fixing other parts of the two-dimensional magnetic field probe station; a two-dimensional magnetic field electromagnet 2 lying flat and fixed on the base; The stage chuck 3 fixed on the base 1 is used to place and absorb the sample to be tested; the probe platform 5 located above the two-dimensional magnetic field electromagnet 2 and fixed to the base 1 through the pillar 4, the probe platform There is an opening 6 in the middle of the opening 6; a plurality of probe bases 7 and probes 8 placed around the opening 6, the probes 8 contact the sample on the stage chuck 3 through the opening 6; the probes 8 are connected to the corresponding DC and high-frequency instruments 10 are used for measurement; a set of microscopic measuring devices 11 is fixed on the column 12 on the edge of the prob...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention belongs to the technical field of physics and semiconductor measurement, and particularly relates to a two-dimensional magnetic field probe table measuring system. The measuring system comprises a base, a two-dimensional magnetic field electromagnet, an object table clamping plate arranged in the center of the magnetic pole of the electromagnet and fixed on the base, a probe table and a microscopic measuring device, wherein an opening is formed in the middle of the probe table, a plurality of direct-current and high-frequency probe seats and probes are arranged around the opening, the probes are in contact with samples on the object table clamping plate through the opening, and a plurality of direct-current and high-frequency instruments are connected with the probes to measure the samples in the magnetic field environment. According to the integrated and intelligent two-dimensional magnetic field probe table measuring system, the measurement function of the two-dimensional magnetic field probes can be realized; more probe seats and probes can be placed, so that relatively complex measurement in the magnetic field environment can be realized; the mechanical vibration is small, the flexibility is good, the cost performance is high, and the application scenes are wide.

Description

technical field [0001] The invention belongs to the technical field of physics and semiconductor measurement, and specifically relates to a two-dimensional magnetic field probe station measurement system. Background technique [0002] The probe station is a widely used non-destructive testing method in the field of physics and semiconductors. It can measure the electrical properties, optoelectronic properties, and high-frequency properties (radio frequency, microwave, millimeter wave, terahertz wave) of materials or devices. a platform. Magnetic field probe stations can provide magnetic fields and apply them to materials or devices to study their related properties under magnetic fields. Typical applications include magnetism, spintronics, semiconductor physics and devices, quantum devices, etc. [0003] At present, magnetic field probe stations are widely used, but they have shortcomings: the existing magnetic field probe stations mainly provide a magnetic field in one dim...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01R33/12
Inventor 冯正刘清锋岑冀娜苏娟谭为成彬彬吕立明邓贤进张健
Owner INST OF ELECTRONICS ENG CHINA ACAD OF ENG PHYSICS
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products